CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 50 + 45 (n 2) 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 60 + 45 (n 2) 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(different sides/same side) 10 100 100 110 120 D-A5, D-A6 D-F5, D-J5 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 "n" pcs. (same side) 10 + 55 110 + 55 120 + 55 100 + 55 100 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs. (different sides/same side) 20 100 100 110 120 D-A59W (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 "n" pcs.

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Rotary Actuator

Metering valve A regulates the clockwise rotation speed of the shaft and throttle valve B regulates the counterclockwise speed to the shaft. 9 0 y 1 a y w a y e w k y of e e SOL.1 k g n of ra e n io g at ot n R ra R +4 0 n ot io at 0 ot at R 8 io 1 R n +4 0 y a ra ot w 0 n y g e e at k of 9 io 1 n y A B a ra w n y g e e k of Metering Valve with Silencer 204 Rotary Actuator with Solenoid

NCQ8

switch Built-in magnet Number of auto switches Mounting Through-hole Both end tapped Rear clevis Front screw clearance hole Rear screw clearance hole Through screw clearance hole B A C E M N Nil S n 2 pcs. 1 pc. n pcs.

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

RHC

B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 6 1/4, 3/8 8 1/4, 3/8 10 1/4, 3/8 10 1/4 Maximum

5 Port Air Operated Valve Series SYA3000/5000/7000 1

n: Station Formula L1 = 87 x n + 83 L2 307 394 481 568 655 742 829 916 1003 L2 = 87 x n + 133 Model 2 257 3 344 4 431 5 518 6 605 7 692 8 779 9 866 10 953 L L1 VVPA450 L3 L4 356 464 572 680 788 896 1004 L4 = 108 x n + 140 L3 = 108 x n + 90 306 414 522 630 738 846 954 VVPA460 ( ) for VVPA460 5-3-30 1 4/5 Port Air Operated Valve Series VSA420 Model Flow characteristics P A/B A/B EA/EB

Prevents Micro-Bubbles

N SMC E J B 2-P Q (LVA6) With indicator With flow rate adjustment (Max.

MGP

2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Stopper Cylinder

V L G E M 4 x N through 8 x O counterbore T 0 0.1 D Mounting: Both ends tapped RSQA [mm] A + 2 stroke B + Stroke H + Stroke V L E M 4 x N through 8 x O counterbore O1 thread Bore size B O1 R 16 41.5 M4 x 0.7 7 20 45 M6 x 1 10 32 48 M6 x 1 10 40 52.5 M6 x 1 10 50 54 M8 x 1.25 14 O1 thread B + stroke R R * Dimensions other than those shown above are the same as the drawings above.

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15