High Purity Chemical Valve

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" LQ2 integral fitting 12 1/2" 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.

2/3 Port Valve

10 VXFC -2 05 10 VXFC -5 100V AC 200V AC 05 10 3A 1A 24V DC Power supply fuse ON time OFF time Time repeatability 0.01 to 1sec 0 to 120sec Max. 20% of set time 5, 10 0 to 50C 35 to 85% (No condensation allowed) MAX. 1A MAX. 0.5A 2000V Time setting How to Order Controller Number of output points Operating ambient temperature Operating ambient humidity Ouput current Noise resistance VXFC

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

40 10 10 20 A A 1 30 10 10 15 For D-F9 Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation range.

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

Fieldbus system EtherCAT compatible SI Unit

+10 V 1=-5+5 V 2=-20+20 mA 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080D (AXA) 40xA:01 40xA:02 Channel 0 Channel 1 (Analogue range) 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080E (AXB) 1: x = Unit No.

Prevents Micro-Bubbles

10 11 12 13 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class Body class Tubing size Plug Tubing size Plug LVC 6 1/4" 6 1/4" LVA Base type 2 2 8 8 A Stacking type LVH 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" LVD 02 2 stations 3 3 12 1/2" 12 1/2" LVQ 05 5 stations 12 1/2" 12 1/2" LQ 4 4 19, 3/4" 19, 3/4" LVN TI/ TIL How to Order Valve PA LVH 2 0 S07 A PAX Body class

JXCx-OMX0009

Please refer to 10. Memory map for details of each signal.

LEC-OM071xx

List of Parameters.10-2 10.1 List of Parameters.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.1.3 MECHATROLINK-III Common Parameters.10-37 10.2 Parameter Recording Table.10-45 1.

NCG/CG1

BJ2 -016 BA -05 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -04 BA -05 BA -06 BA -08 BA -10 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 BA01 BA02 BA32 BMA2-050 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

10 stations Rc 3/4 Note 1) Max. 10 stations.

VFS

R1, R2 P 1 Side 2 Common Common Bottom Option D-sub connector Non Plug-in Type: Grommet Terminal, DIN Terminal Wiring for every valve. 10 VV5FS4 2 05 03 DIN terminal Thread type Series VFS4000 Manifold Stations Port size Nil N Rc NPT NPTF G Grommet terminal 02 2 stations Symbol 03 04 A, B P, R1, R2 T Non plug-in type 3 8 Rc Rc Rc M Mixed F 10 10 stations 1 2 1 2 Option Symbol For bottom

MB

11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.

Series AS-FM/AS-M/ASD-FM

Type 2 3 Elbow Universal Applicable tube outside diameter Metric size Inch size 3.2 4 6 8 10 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control system 0 1 Meter-out Meter-in Use a 1/8" tube.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

EXxx-OMN0037CN

0b) [V] [mA] 16 10 [V] [mA] 16 10 15 V 420 mA 010 V 05 V 020 mA 07FF 2047 5.25 21 07FF 2047 10.5 5.25 21 078E 1934 5 20 079E 1950 10 5 20 0400 1024 3 12 0400 1024 5.25 2.625 10.5 0072 114 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -22No.EX-OMN0037CN-A -1010

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)

JXCx-OMT0062

Please refer to 10. Memory map for details of each signal.