PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A7H (With indicator light) D-A72H D-A73H D-A76H Auto switch model Applicable load Relay, PLC Relay, PLC IC circuit Load voltage 200 VAC 24 VDC 4 to 8 VDC 100 VAC Max. load voltage/Load current range(3) 5 to 10 mA 5 to 40 mA 20 mA 5 to 20 mA Contact protection circuit 2.4 V or

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

MVGQ

-X 20Since there are other applicable auto switches than listed, refer to page 10-16-20 for details. For details about auto switches with pre-wire connector, refer to page 10-20-66.

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

300 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 14 5-M5 0.8 (Piping port) 14 28 28 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 28 Manifold Drawings Series SYJ3000 Type 20 Manifold: Top Ported / SS5YJ3-20Station (mm) Grommet (G), (H) G : About 300

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

HRX-OM-R016

0.2 20 0.1 10 Availavel area 0.0 0 0 5 10 15 20 25 Circulating fluid flow[L/min] Fig. 9-9 Pump capacity(HRS030--20-MT) 9.7 Required facility water flow (for water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water for the operation with rated circulating fluid, cooling capacity which is described

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

HRX-OM-W060

return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump Capacity 8-9 HRX-OM-W060 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 Circulating 0.6 fluid outlet 0.5 Pressure [MPa] Lifting head [m] Lifting head [m] Usable flow rate range 0.4 0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure 40 30 External hold 0.2MPa 0.2MPa 30 0.3MPa 0.3MPa 0.4MPa 20 0.4MPa 20 0.5MPa 0.5MPa 0.6MPa 10 0.6MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-30/MDHR2-30 80 50 H 70 Overhang distance H (mm) Overhang distance H (mm

LEF-OM002xx

to 760 10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

Stroke Reading Cylinder and Counter

VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.