Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

SFOD-OMT0010

Safety Instructions . 5 2. Product Outline . 7 2.1 Features . 7 2.2 How to Order . 8 2.3 Product configuration . 9 3. Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

Stopper Cylinder

10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

10 MY2HT16 MY2HT16 8 8 8 Data 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load weight kg Load weight kg Load weight kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

HRX-OM-I051

. 5-5 5.3.7 Setting screen . 5-6 5.3.8 Mode Selection screen . 5-7 5.3.9 Initial Setting screen . 5-7 5.3.10 Maintenance screen . 5-9 5.3.11 Option screen . 5-9 5.3.12 Alarm Display screen . 5-10 5.3.13 System Information screen . 5-10 5.4 Examples of System Operation . 5-11 5.4.1 Example 1: Circulating fluid set temperature is changed from 23.0C to 34.1C. . 5-11 HRZ Series TOC-2 HRX-OM-I051

Thermo-con

HEC012 1 7 3 gpm 2 4 5 6 1 1.5 3 2 0.5 gpm 2.5 0.30 MPa 0.15 MPa 40 psi 20 psi 0.25 35 Discharge pressure Fluorinert FC-3283 Discharge pressure 15 0.20 0.10 30 60Hz 0.15 Fluorinert FC-3283 10 20 Water 50Hz 0.10 0.05 15 5 60Hz Water 0.05 5 50Hz 0.00 0 2 4 6 8 10 12 0.00 0 5 10 15 20 25 30 Circulating fluid flow rate (L/min) Circulating fluid flow rate (L/min) Pressure Loss in FacilityWater

Digital Flow Switches Series PF2A

Specifications PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 Air, Nitrogen Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit 0.5 to 10.5 l/min 0.5 to 10.5 l/min 1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

HEC_W-E

-4-9 4.6.5 TEMPERATURE SENSOR FINE CONTROL FUNCTION -4-9 4.6.6 SETTING VALUE MEMORY FUNCTION -4-9 4.6.7 UPPER/LOWER TEMPERATURE LIMIT ALARM FUNCTION -4-9 4.7 AUTOTUNING FUNCTION -4-10 5 NAMES AND FUNCTIONS OF COMPONENTS -5-1 5.1 HEC006 -5-1 5.2 HEC012 -5-2 5.3 OPERATION PANEL -5-3 5.4 DISPLAY -5-4 5.5 RESERVOIR CAP -5-4 6 SPECIFICATIONS -6-1 6.1 SPECIFICATION TABLE -6-1 6.2 PERFORMANCE CHART

E-P HYREG ® Series VY1

) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Shore Durometer A scale HS(5) 10 Series ZPR ZPR 10/13/16 F-0-B5 (Without Buffer/Female Thread) ZPR 20/25/32 F-0-B 5/8 (Without Buffer/Female thread) S S Applicable tube O.D.

Model Selection 1

15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

MNB

A B B A A B A B A 32.5 25 24.5 35 8.5 32 32 4.5 9.5 12 8 5.5 0 1.5 2 13 36.5 27.5 27.5 38.5 8.5 40 40 4.5 9.5 12 8 5.5 0 1.5 2 13 41 34 34.5 43.5 9 50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits

Mechanically Jointed Rodless Cylinder Series MY2

10 10 MY3M MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Mass/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load mass kg Load mass kg Load mass kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16

A

NAM250-N03D 38 172 76 10 NAM350-N04D 12 204 90 10 S Y M B O L S NAM450-N06D 34 225 106 10 NAM550-N10D 1" 259 122 10 NAM650-N14D 112" 361 160 10 NAM850-N14D 2" 473 220 10 Manual and Autodrain types are same overall dimensions.

Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (