Clean Series: 21 [Relief Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: D (Built-in), Series: A2 (Standard), Mounting: B (Basic Style), Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm

Clean Series: 10 (Relief Type), Magnet: D (Built-in), Series: A2 (Standard), Mounting: B (Basic Style), Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm

Clean Series: 22 [Vacuum Suction Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: D (Built-in), Series: A2 (Standard), Mounting: B (Basic Style), Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm

Magnet: Built-in, Mounting: Basic Style, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: Rc, Stroke: 300mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: Rc, Stroke: 300mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Basic Style, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: Rc, Stroke: 300mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: B64--Reed, DC Volt >5 <24, AC Volt <200, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Basic Style, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: Rc, Stroke: 300mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: -, Number: -

Clean Series: 21 [Relief Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: Built-in, Series: Standard, Mounting: Basic Style, Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Relief Type, Magnet: Built-in, Series: Standard, Mounting: Basic Style, Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: 22 [Vacuum Suction Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: Built-in, Series: Standard, Mounting: Basic Style, Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm, Auto Switch: -, Lead Wire or Prewired Connector: -

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

Lightweight and Compact

Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.

53

(In locations where strong electric fields, strong magnetic fields and surge voltage occur.) 11. In locations where static electricity occurs, or conditions which make the product discharge static electricity. 12. In locations where high frequency occurs. 13. In locations where damage is likely to occur due to lightning. 14.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Output specification Port size: (inch) Symbol Nil 1 2 Specification Series PF2D300 Series PF2D200/300 Series PF2D300 Applicable display unit (monitor) model 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Output for display unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

/301 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid not to corrode nor erode deionized water and/or Teflon.

SFOD-OMT0012

For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

VCL

Grommet: G Conduit: C 300 V D D F Q F Q 280 300 VC Class H coil Broken line section C C G1/2 R R VDW VQ E E VX2 A H A H B B 2-P Port size 2-P Port size VX 2-M, thread depth N 2-M, thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K K VN

Refrigerated Air Dryer

Standard Products IDFAE Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C

Multistage Ejector (N)ZL Series

Suction cover 1 9 PVF Sound absorbing material B ZL112-SP01 Front cover Without valve 2 10 PVF Sound absorbing material A (set no. for 9, 10 &11) End cover 3 11 PE Suction filter Body When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on pages 5 & 6. 4 Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent

AC Servo Motor Driver (MECHATROLINK-II type)

Refer to LECYM Operation Manual,section 3.3.1. and 3.3.2. 11 - 2.3.1 I/O Signal (CN1) Names and Functions The following table shows the names and functions of I/O signals (CN1). (1) Input Signals Signal Pin No.