VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 Courtesy

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L2=16n+22 n: Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 12 203 214 237.5 248 13 219 230 250 260.5 14 235 246 275 285.5 7 123 134 162.5 173 8 139 150 175 185.5 9 155 166 187.5 198 10 171 182 212.5 223 11 187 198 225 235.5 4 75 86 112.5 123 5 91 102 125 135.5

AHC System Series MA

MHK MHS 90 reverse unit MHC Air gripper for auto hand changing system MHT MHY Variations MHW Adapter for assembling robot Series MA2 8, 10, 11, 14, 15, 20 Series MA3 10, 11, 14, 15, 20, 24, 25 Additional installation unit of electrical contact point (Able to add 8 contact points) 90 reverse unit -X Air grippers for auto hand changing system (10 to 20) Standard type Narrow type Added to the

MK

21.5 M4 x 0.7 11 20, 25 18-(0 to 10) R thread Auto switch Minimum bending radius of lead wire 10 In case of connector 2-M5 x 0.8 F (2) M8 x 1.25 Effective thread depth 11 through 2 x 2counterbore depth 7 depth 3 R + Clamp stroke Q + 2 x Clamp stroke Both ends tapped style: MKA M6 x 1.0 R + Clamp stroke (Basic) (mm) U S R K L Oh9 Q F E C B A Model MKB20 MKB25 0 0.052 0 0.052 0.15 0.15

VZ1000

232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 333.5 325 312 12 16 360.5 350 328 16.5 17 373 362.5 344 14.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 VQ7-8

Digital Flow Switches

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

PF3W7x.eng

Rc(NPT)11/4 40 to 42 Nm [ oUt2] Output mode (OUT2) [ HYS] Hysteresis mode Element Description Rc(NPT)11/2 48 to 50 Nm [ 2ot] Switch operation (OUT2) [ 2_P] Normal output The switch turns on within a set flow range (from P1L to P1H) during window comparator mode. Set P1L (switch lower limit) and P1H (switch upper limit) using the setting procedure above.

-- NCM seies

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

Mechanically Jointed Rodless Cylinder Series MY2

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Operating Environment Warning 1.

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

Process Valve Series VNA

(mm) Symbol 3 2 1 Port size Rc 100 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note 2) Note) Note 2) 4 5 6 7 9 Other A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 24 VDC 12 VDC 7 Note 2) Valve size 1 to 4 Note 2) 240 VAC 50/60 Hz 11 15 11 10A 3 8 Note 2) B:

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !3 o i q w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Material Note No. Description No.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper 14 Step motor (Servo / 24VDC) 11 - 3.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Symbol AMD 4.6-7 Micro Mist Separator Series AMD AMD150 to AMD850 How to Order AMD 250 03 J B Body size Options J Drain guide 1/4B female thread R IN R OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Symbol Description None Bracket T Element service indicator B N.C. auto drain C N.O. auto drain D Please refer to p.4.7-7 regarding How to Order of case

VDW Series

-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.