240

T4 = 0.2 [s] T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V 40 0.5 200 (0.067 + 0.067) 200 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

Compact Type

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2-M5 x 0.8, depth 8 Z 3 V K 6.5 MX Max. 15 11 M MTS Stroke: S MY MXP16-20B CY Width across flats 12 A MG M8 x 1 H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 24.3 17.1 14.4 40.8 MA 10.5 11 CX 11 8.5 D27.3 -X 34 20Data A 19 6.5 Operating port 2-M5 x 0.8 (Plug

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

closed center / exhaust center / pressure center : SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 0.5 (Pilot port) 1.8 10 4 A B 1.5 8.2 7 19 (Mounting holes) 3.2 22-M3 0.5 (Pilot port) 22 3 49 2.5 (Mounting holes) 3.2 2A B 1.5 18.5 11 17.5 Manual override (Non-locking) A B 1.5 33 16 18.9 18.5 21 13.5 54.5 15 Manual override (Non-locking) 21.6 54.5 28.5 21 R2 P P1 1(Bleed port) 2P R 13 11 0.5 10 5

PF-OMM0004_C

1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -66No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 210 g 260 g 410

IDX-OM-W011

M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i

Compact Type Dual-Rod Cylinder Series CXSJ

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

CRBB-OM00004

Adjustment method 6 3.1 Vertical auto switch unit 6 Operating Range and Hysteresis 6 Auto Switch Mounting 7 Auto Switch Adjustment 10 3.2 Angle adjustment unit 11 Rotating angle with angle adjustment unit 11 Rotating Angle Adjustment Method 11 4.

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Compact Cylinder with Air Cushion

(mm) 63 80 100 A B C D E F H I J K L M N OB P 63 55 15 20 77 31 M10 x 1.5 103 7 17 8 60 9 14 Rc 1/4 30 to 100 73.5 63.5 21 25 98 35.5 M16 x 2.0 132 6 22 10 77 11 17.5 Rc 3/8 40 to 100 88 76 27 30 117 40 M20 x 2.5 156 6.5 27 12 94 11 17.5 Rc 3/8 40 to 100 mm Q RB S U Z Bore size (mm) 63 80 100 34 10.5 93 47.5 19 39 13.5 112.5 57.5 26 43 13.5 132.5 67.5 26 Refer to page 11 for details on rod

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

1

ZZ Bore size ZZ Rc1/8 NPT1/8 20 10.5 11 7.5 54 (59.5) 75 (80.5) 20 60.5 (66) 25 10.5 11 7.5 52.5 (58) 76.5 (82) 25 59 (64.5) 32 10.5 10.5 7.5 53 (59) 77 (83) 32 59.5 (65.5) 40 10.5 10.5 7.5 57.5 (63.5) 87.5 (93.5) 40 64 (70) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 62 (67.5) 20 47.5 (53) 25 11 5 43.5 (49) 67.5 (73) 25 50 (55.5) 32 10.5 5 43.5 (49.5) 67.5 (73.5) 32 50 (56) 40 11

4-channel Flow Monitor ( compatible)

-segments, 7-segments for other) Sub display (right): 5 digits (partially 11-segments, 7-segments for other) Operation light LED is ON when switch output is ON (OUT1, OUT2: Orange) Digital filter 6 Variable from 0 to 30 s/0.01 s increments Enclosure IP65 (front side only when the panel is mounted), IP40 for others Withstand voltage 1000 VAC for 1 minute between terminals and housing Environment

ZP

Form w 1 Material 12 N S U F GN GS 10 10 11 1 ZP UT 13 13 14 1.5 16 16 17 Y 2.5 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 With adapter 10 to 16 w q ZPT UT N A5 10 e Vacuum inlet (Male thread) B Width across flats D 15.5 C A5 M5 x 0.8 A6 M6 x 1 A Model A B C D

XL-OMY0002

12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

MHZ2/MHZJ2

D-Y7NW(V) Auto Switch Weight Table DC (+) Brown [Red] Unit: g Main switch circuit OUT Black [White] D-Y7BW D-Y7PW Model D-Y7NW 11 11 11 Lead wire length 0.5m 54 54 54 Lead wire length 3m DC () Blue [Black] Auto Switch Dimensions D-Y7PW(V) D-Y7W DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-Y7BW(V) OUT (+) Brown [Red] Main switch circuit D-Y7WV OUT () Blue [