Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Mechanical Valves Series NVM, NVFM, NVZNI

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

PSxx-OMR0001CN

0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4 0.4MPapsi 0.4MPapsi 10 5 N 1 2 3 4 5 6 1 2 NPN1 PNP1 P 10 6 3 4 0.2MPapsi 0.2MPapsi 7 10 4 5 6 M 5 SI 10 8 1 7 L 7 L N S 6 7 8 R 6 7 8 T 2 9 B -9No.PS-OMR0001CN-J 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMR0001CN-J 2 / (2 2 2 1 ) ((38)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3

Series GS40 Digital Pressure Sensor 1

SET 20 VY1 + G P.SET PPA AL 14-11-19

70pvvna

Nitrogen gas (N2) Freon 11, 113, 114, Turbine oil , Hydraulic fluid Conduit Carbon dioxide (CO2) (0.7 MPa max.)

Series VCL

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 SMC Pneumatics Inc. (Richmond) 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (804) 222-5221 SMC Pneumatics Inc. (Cleveland) 2305 East Aurora Rd., Unit A-3 Twinsburg, OH 44087 Tel: (330) 963-2727 FAX: (330) 963-2730 SMC Pneumatics Inc.

Series VCS

When connecting piping to a valve, be sure to tighten while holding the valve with a wrench or other tool. 11 Series VCS Direct Operated 2 Port for Steam 2 Port Solenoid Valve for Fluid Control/Precautions 3 Be sure to read before handling Operating Environment Wiring Warning Caution 1. As a rule, use electrical wire of 0.5 to 1.25mm for wiring.

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.-11 oz !

-fl Seies

NVFR4100 NVFB4200 NVFR4300. 4400. 4500 o Gasket NBR vF4000-20 vF4000-20 vF4000-20 Valve mounting bolt Steel MT335-1-1 1 {M4X40) AXT335-1-11 (M4X40) MT335-1-11 {M4X40) Pilot Ass'y SF4KFx-70 (E Series NVFR40O0:Base Mounted Tlpe 2 position single:NvFF4100-OF 3 PositionlDimensians PIug-in 2 Position 2 position double:l{VFR4200-oF 3 posilion closed center:NVFRrBoo-OF 3 position exhaust center:

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-REA63 63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

90

Current model 1 L Released into atmosphere No fixed throttle 4 to 11 L Fixed throttle * Poor quality of air may cause operation failure. Select a model that is suitable for the desired air cleanliness by referring to Air Preparation Equipment Model Selection Guide (pages 2 and 3) for air quality. OUT IN (SUP.) OUT IN (SUP.)

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

Series 12-REA Sine rodless cylinder

, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

Regulator for 2 MPa ARX 20

Dimensions Dimensions 4-R2.5 12 25 41.5 17 34 24 R16.5 Panel nut Gasket 26 11 1.5 24 44 Max. panel thickness 4.5mm 5.4 1.6 54 Install the gasket underneath the panel and bracket (bonnet side).

100 to 600

MP2 - Double detatchable head side clevis style (D)

1 1/4-12 2.00 2.375 1.88 6.88 800 (8") 1.75 1 1/4-12 2.00 2.375 1.88 7.00 Example: NCA1B500-0400-XC3BC (B = port, C = cushion) 11