AFF

Please refer to pages 14-20-13 to 14-20-14 for details. Sight glass AFF75B is aluminum casted. Tempered glass Replacement Parts AFF11B Model No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

13 Mechanically Jointed Rodless Cylinder Short Type/Basic Type Series MY3A/3B 16, 25, 40, 63 How to Order MY3 A 16 300 LS M9B Type Number of auto switches Nil S n Short type (Rubber bumper) Basic type (Air cushion) 2 pcs. 1 pc. n pcs.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

6H9 (+0.030 0 ) depth 7 Body mounting reference plane (B dimension range)1 60 106 58 74 7 6H9 (+0.030 0 ) depth 7 L Cable length 250 86 (165) A (Table traveling distance)2 (86) 13 (3.1) (4) [(2)]4 [Origin]4 (90) [88]4 Stroke Origin3 88 [(90)]4 (90) 2 [(4)]4 65 24 61 (68) 8 31 Motor cable 68 M4 x 0.7 thread depth 8 (F.G. terminal) 53.8 8 Auto switch groove5 (1 row per side) 60 D x 150 (=

KN Series Nozzles for Blowing

13 13 13 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 D 2 Connection thread H1 A L1 Reference dimensions after R thread installation. 862 Nozzles for Blowing KN Series Sensing Heads Standard sensing head/KNP (mm) Applicable tubing O.D.

33

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Operating Environment/Storage Environment Warning Warning 1. Do not use in the following environment as it will lead to a breakdown.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Gray (40) (10) (8) ( 4.1) (6.9) Black Red With power saving circuit Electrical Circuit (with power saving circuit) Red (+) Power consumption is reduced by approximately 75% compared with the standard product by eliminating the need for electrical current for holding.

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

MHL2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

V100

Grommet (G), (H): V11 24(A)-G H-M5 13.1 (Light/Surge voltage suppressor) 5 + 13 15.5 3 13 3 28.5 [32.4] 10 G: Approx. 300 H: Approx.600 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 30.9 [33.1] 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5 5 19 (Piping

PSxx-OMH0002CN

No.PS-OMH0002CN-D / / / / / / / / ISE70 ISE75(H) 2 8 9 10 13 13 13 14 16 16 21 23 25 26 34 34 36 -1No.PS-OMH0002CN-D (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO

Digital Flow Switch

Wide range of flow measurement with one product 6000 10 12000 Applicable flow range [L/min] Port size 30 60 120 500 1000 3000 30 3000 3000 L type PF3A703H 1 60 6000 6000 L type PF3A706H 1 1/2 120 12000 12000 L type PF3A712H 2 Pressure loss: 75% reduction*1 Improved drainage and resistance to foreign matter (20 kPa / 5 kPa) *1 Compared with the current model (PF2A7H/Large flow type).

CS1

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261

High Vacuum Angle Valve

Table 1: Suffix Symbol for Seal Material Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for Plasma Compound no. 2101-80*1 70W 4079 SS592 SS630 SSE38 1232-70*1 3310-75*1 *1 Produced by Mitsubishi Cable Industries, Ltd.

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

Single Axis Electric Actuator Series LJ1H

Model Regenerative Absorption Unit Selection Guide Allowable Moment (Nm) LJ1H2021PF-K (Power supply voltage 100VAC) LJ1H2022PF-K (Power supply voltage 200VAC) Allowable static moment Pitching Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Allowable dynamic moment 71 75 25 50 75 100 125 150 175 200 225 250

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70 H 144 216 256 G 114 186 226 F 84 126 146 E 28 58 78 D 76 106 126 B C 45 75 95 A MHL2-16D MHL2-16D1 MHL2-16D2 112211221122114 168 208 40 70 90 929 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions MHL2-20D 11222 x 6.6 through (Hole for mounting body) A B C D 2 x M6 x 1 thread depth 7 (Mounting

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

Nozzle Type Ionizer

L1 L2 Number of spacers IZN10E-ES2 37.8 45 4 IZN10E-ES3 55.2 60 6 IZN10E-ES4 72.6 76 8 13 Nozzle Type Ionizer IZN10E Series Functions 1. Maintenance warning Constantly monitors lowered static neutralization performance due to contamination or wear of the emitter. The maintenance LED lights up and maintenance signal is generated. 2.

CG1x-OM0006N

CG5A 11~2 2 31 4 5 6 7 13 2-6-3. P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.