IZx-OMX0087

) Note 13) Stop Changing the setting mode Key-lock setting mode Note 10) Display Status Key-lock setting.

AC Servo Motor Driver (Pulse input type/Positioning type)

Programmable logic controller 2m max. ( Note 8) FX3UMT/ES (Note 13) Diver S/S Servo amplifier 24V 0V (Note 7) (Note 7) (Note 2) L CN1 CN1 24VDC PLC power (Note 4, 1 0 ) 1 DICOM 9 ALM supply RA1 Trouble (Note 6) N OPC 2 (Note 10, 12) 12 MBR Electromagnetic brake interlock RA2 13 DOCOM Y000 PP 23 23 Note1) COM1 (Note 14) 25 Note1) Y010 NP 25 10m max.

CEx-OMI0064

8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

Series IDG

IDG3, 3H IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG-EL5 IDG-EL5H IDG-EL10 IDG-EL10H IDG-EL20 IDG-EL20H IDG-EL3 IDG-EL3H 7 Membrane module kit 8 9 IDG-DP01 Dew point indicator kit Option: P IDG-DP01-X001 13 Membrane Air Dryer Series IDG IDG30, 50, IDG30H, 50H IDG30L, 50L Optional specifications With fitting for purge air discharge (Option: P) OUT IN Purge Purge IDG60, 75, 100 IDG60H, 75H,

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

MQQ

4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25 Refer to page 18 for details regarding the rod end nut and mounting nut. 14 Series MQM Refer to the standard

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Values at the initial period) Solenoid Specifications Base mounted 13 24 SY1 A 13 24 Series SY1 Grommet (G)/(H), L plug connector (L) M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60 Hz 100, 110, 200, 220 JIS Symbol SY113 4 (A) SY123 4 (A) 10 to +10% Allowable voltage fluctuation Power consumption (W) DC 0.75 W (With indicator light: 0.8 W) (A) 2

1

-13

Series SY100 3 Port Solenoid Valve Rubber Seal

Solenoid Specifications 3 (R) 1 (P) 1 (R) 3 (P) Order Made P.2.1-15 13 24 SY1 A 13 24 SY1 Series Grommet (G), (H), L plug connector (L), M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60Hz 100, 110, 200, 220 Allowable voltage 10 to +10% Power consumption (W) (1) DC 0.75W (With light: 0.8W) 0.5W (With light: 0.55W) 0.9 (With light: 1.0) 100V 110V [115V

VCC

Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668

VZ1000

Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

OMR0031

Product Overview . 8 2.1 Features . 8 2.2 How to order . 11 2.3 Structure of the product . 12 2.4 Start up procedure . 13 (1) Check the contents of the package . 13 (2) Mounting the controller . 13 (3) Wiring and connection . 13 (4) Power supply ON and alarm check . 14 (5) Basic parameter setup and Step Data setup . 14 (6) Test operation . 14 3.

IDX-OM-W034

Please refer to 11-6 Electric circuit when option T is included. 12-3How to perform maintenance 12 2 IDFB Series IDX-OM-W034 Air Dryer 13 Service Record 13 Service Record 13-1 Service Record It is recommended to keep a maintenance/service record. Parts No.

End Lock Cylinder Series CBG1

) 164 159 (168) 173 50 40 17 78 59 (25) (13) 187 182 (194) 199 63 40 18 78 72 (25) (13) 187 182 (194) 199 80 52 10 80 59 213 207 (221) 229 100 62 7 80 71 213 207 (221) 229 Dimensions inside ( ) are for long strokes.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

B 55 A A B Section BB Long stroke type Coupling H S LJ1H202 C-700 to 1000LJ1H202SC-700 to 120010.5 35.3 P.C.D Thread Motor 8 30 26 32 13 Section AA (Housing interior) Motor mounting area detail Series LJ1H S30 Motor mounting area dimensions Mitsubishi Electric Corporation Yaskawa Electric Corporation Manufacturer Matsushita Electric Industrial Co., Ltd.

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 40 22 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 61.5 30 48 32 10 19.5 31.5 21.5 30.5 13.2 13 17 21 7 1 4 3 8 73.5 44 52.8 44 12.7 23.7 37.7 25 35.9 15.2 15 18.5 22 9.5 5 16 1 2 83 62 Metric Applicable

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Cylinder bore size (mm) 6 Above nos. 13 & 15 (2 pcs. ea.), 14 (1 set) MXP6-PS MXPJ6 No.

MXW Series Long Stroke Slide Table

Dimensions MXW 8 Stroke: 75, 100, 125, 150 Operating port 2-M5 x 0.8 (mm) J 10 Width across hexagon socket hole 2.5 Scale: 30% 5.5 Width across flats 8 5H9 +0.03 depth 4.5 0 4-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth

Guide Cylinder Series MGG

88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500 21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F