COQ2BP

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

212

) Inlet pressure: 44 psi (0.3 MPa) Fluid: Water LVR20 LVR40 LVR50 36 [0.25] 36 [0.25] 36 [0.25] Outlet pressure psi [MPa] Outlet pressure psi [MPa] Outlet pressure psi [MPa] 29 [0.20] 29 [0.20] 29 [0.20] 22 [0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0 0 7.3 [0.05] 15 [0.1] 22 [0.15] 29 [0.2] 36 [0.25] 44 [0.3] 0 0.00 7.3 [0.05] 15 [0.10] 22 [

Speed Controller with

15.4 8.8 13.5 12.7 13.5 17 18 17 18 21 22 21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

modular-press-e

-30 HNBR 136147-30 Oil-free specification 136148 NBR 136148 Standard model HNBR 136148-30 Oil-free specification 136148-30 O-ring G NBR KA01731 Standard model for digital pressure switch KA01731 KA01613 HNBR KA01613 Oil-free spec. for digital pressure switch 136149 NBR 136149 Standard model O-ring H 136149-30 HNBR 136149-30 Oil-free specification Fitting assembly J Refer to page 239.

Modular F.R.L. Pressure Control Equipment

-30 HNBR 136147-30 Oil-free specification 136148 NBR 136148 Standard model HNBR 136148-30 Oil-free specification 136148-30 O-ring G NBR KA01731 Standard model for digital pressure switch KA01731 KA01613 HNBR KA01613 Oil-free spec. for digital pressure switch 136149 NBR 136149 Standard model O-ring H 136149-30 HNBR 136149-30 Oil-free specification Fitting assembly J Refer to page 239.

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

7.4

Note 6) The flow rate of the body ported product with a built-in silencer decreases by 30%.

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

o

) NVJA3220 2 posilion double 0.055 (25) sody ported M3x0.5 IM3xo.5] 0.05 [0.05M3x0.5 NVJA3320 3 position closed center 0.062 (28) NVJA3420 3 position exhaust center type NVJA3520 3 position pressure center o.o4a (22) NVJA32302 position double 0.0s5 (2s) xvJA3330 3 position closed center 0.062 (2s) NVJA3430 3 position exhaust center t{vJA3530 3 position pressure center NVJA3 t 30 2 position

o

) NVJA3220 2 posilion double 0.055 (25) sody ported M3x0.5 IM3xo.5] 0.05 [0.05M3x0.5 NVJA3320 3 position closed center 0.062 (28) NVJA3420 3 position exhaust center type NVJA3520 3 position pressure center o.o4a (22) NVJA32302 position double 0.0s5 (2s) xvJA3330 3 position closed center 0.062 (2s) NVJA3430 3 position exhaust center t{vJA3530 3 position pressure center NVJA3 t 30 2 position

Title not found

Refer to page 30 for the noise filter set. Refer to the LECA Operation Manual for installation.

Soft Start-up Valve

Tightening Torque when Piping Connection thread Proper tightening torque [Nm] Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 4. Piping to products When piping to products, avoid making an error of supply port etc., by referring to the operation manuals. 5.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

SYJ3000-22-1 V111 (T) No. 6 7 Description Sub-plate Pilot valve No. 1 2 3 4 5 Description Material Zinc die-casted Resin Resin Resin Alminum, H-NBR Note White White White Body Piston plate End cover Piston Spool valve assembly How to Order Connector Assebmly for L and M Plug Connector How to Order Pilot Valve Assembly : SY100-30-4AV111 5 G For DC : SY100-30-1AFor 100 VAC Coil specifications

Vacuum System Peripherals:

30 e Valve Model Fill in the blanks below with symbols of necessary specifications.

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

Digital Flow Switch

30 s, 40 s, 50 s, or 60 s.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 Bore size (mm) 50 63 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 Bore size (mm) 50 63 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)