SMC Corporation of America
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Refer to the specifications of actuator for more details. 22 Step Motor Controller (Servo/24 VDC) Series LECP6 Servo Motor Controller (24 VDC) Series LECA6 How to Mount a) Screw mounting (LEC6-) (Installation with two M4 screws) b) DIN rail mounting (LEC6D-) (Installation with the DIN rail) DIN rail is locked.

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

22 24.5 24.5 40 48 62 66 1/4, 3/8 1/2 3/4 1 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) Bracket mounting a b e f g h i j 56 56 70.5 70.5 Port size P Model a1Note) d 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 52 60 68 73 75 75 92 92 30 34.5 39 41 2.3 2.3 2.3 2.3 6.5 6.5 6.5 6.5 10.5 10.5

operating conditions Compressed air 0.3 to 0.85 0.3 to 1.0 5 to 55 5 to 55 5 to 50 5 to 50 Ambient temperature (oC) Note 1) Standard Outlet air atmospheric pressure dew point (oC) performance 15 Inlet air flow rate (L/min [ANR]) Note 2) 28 25 56 50 111 100 222 200 329 300 550 500 665 600 830 750 1110 1000 Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) 3 6 11 22

VQ Proper tightening torque NNm (kgfNcm) Tightening Torque for Piping LVM Connection threads M5 1.5 to 2 (15 to 20) VCA Rc 1/8 7 to 9 (70 to 90) Rc 1/4 12 to 14 (120 to 140) VCB Rc 3/8 22 to 24 (220 to 240) Reference Tightening of M5 fitting threads After tightening by hand, tighten approximately 1/6 turn further with a tightening tool.

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

/N.O. 1/2 to 2 N.C. 1/4 to 1/2 10 to 50 20 to 50 10 2 Port for Dust Collector (Solenoid type, Air Operated type) Air Operated 2/3 Port VXF21/22, VXFA21/22 VXA21/22, VXA31/32 For Air For Air, Vacuum, Water, Oil The VX series has been renewed as the new VX series, with a new construction Orifice size mm Valve type Port size Orifice size mm 3 to 10 1.5 to 4 Valve type Model Port size VXA21/22

Refer to the specifications of actuator for more details. 22 Step Motor Controller (Servo/24 VDC) Series LECP6 Servo Motor Controller (24 VDC) Series LECA6 How to Mount a) Screw mounting (LEC6-) (Installation with two M4 screws) b) DIN rail mounting (LEC6D-) (Installation with the DIN rail) DIN rail is locked.

[0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0 0 7.3 [0.05] 15 [0.1] 22 [0.15] 29 [0.2] 36 [0.25] 44 [0.3] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] Pilot pressure psi [MPa] Pilot pressure psi [MPa] Pilot pressure psi [MPa] 3 Regulator for Chemical Liquids Series LVR Specications

18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87

21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

/2" 1/2" 15.6 17 17 105.7 60.9 28.4 26.4 22 22 10 8 Refer to the standard bracket dimensions.

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore Size: 12mm, Symmetric Type: L (Symmetric), Stroke: 40mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore Size: 16mm, Symmetric Type: L (Symmetric), Stroke: 40mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore Size: 25mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)