Piping: Body Ported, Stations: 4 Stations, A, B Port: NPT, Bracket: Bracket

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 4 Stations, A, B Port: NPT, Q: Q (CE Marked)

MG

weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20

MGP

to 74st 53 53.5 75 to 200st 84.5 85 201 to 400st 122 122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5 201 to 400st 122 122 20 to 39st 10 16 40 to 124st 27 32 125 to 200st 51 51 201 to 400st 69 68.5 20 25 20 25 A E A E Bore size (mm) Bore size (mm) 25 to 74st 97 97 106.5 106.5 115 137 75 to 200st 102 102 118 118 142

MXQ

MXQ16-20 MXQ16-20 MXQ16-20 MXQ16-20 D0.02 0.04 MXQ16-10 MXQ16-10 MXQ16-10 0.01 MXQ16-10 MXQ16-10 -X 0 0 400 100 200 300 150 150 50 100 200 50 100 200 0 20Load (N) Load (N) Load (N) Data 20 20 20 Lr = 160 mm 0.08 MXQ20-125 MXQ20-150 MXQ20-125 MXQ20-125 MXQ20-10 MXQ20-10 MXQ20-20 MXQ20-20 MXQ20-30 MXQ20-30 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-75 MXQ20-40 0.12 MXQ20-40

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

D D (mm) 10 15 20 30 40 Size 14 18 20 22 30 D Note 1) Only side ports are available except basic type.

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Single Axis Electric Actuator Series LJ1H

15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 393 135 A section detail (Switch groove) 92 Stroke + 32 3-8H10 depth 5 11.5 20 67 90 (T-slot pitch) 45 62 92 58 30 8-6.6 9.4 4.5 10 Stroke + 216 18 T-slot

Environment

400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 46 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25

JA/JAH/JB/JS

16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 8 9 9 13 13 13 15 15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic

ZU

67 10 67 Air consumption 53 53 53 53 40 40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14 0 0.1 0.2 0.3 0.4 0.5 0.6 0 5 10 15 20 25 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow rate N (l/min(ANR)) Supply pressure (MPa) Supply pressure (MPa) Suction flow rate N (l/min(ANR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

Please contact us for the latest version.sales@ocaire.com, MFLD, BODY PT, SY7000 SERIES, VALVE, SS5Y7 MANIFOLD SY7000, 2J, SS5Y7 NO SIZE RATING

LV50-OMQ0002

4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g -71No.LV50***-OMQ0002-G Dimension of the cable with M12 connector lead wire (LFE-1-A3) 4 Black Blue 3 White 2 1 Brown -72No.LV50***-OMQ0002-G Revision A : Contents revised in several places.

VM

F.O.F. 23N 2mm O.T. 3mm T.T. 3.5-32 VM800 Series VM800 Roller Lever/VM830-01-01 JIS Symbol 20 P.T. F.O.F. 20N 30 O.T. 50 T.T. Adjustable Roller Lever/VM830-01-13 JIS Symbol 20N F.O.F. At lever length 38.1mm 20 P.T. 30 O.T. 50 T.T. Adjustable Rod Lever/VM830-01-14 JIS Symbol 2.3N F.O.F.

SFOD-OMT0005CN

(PLC ) No. (01-051) <> (1)( )1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2 [2](P.53) No. B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless