4/5 Port Air Operated Valve Series SYJA3000

port) 2-3.5 (For mounting) SX M3 x 0.5 (A, B port) L2 3.5 L1 (Station 1) (Station n) (Light/Surge voltage suppressor) + + + + + 42 [49] 26.6 13.5 L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 42 [49] 26.6 M8 x 1 53.1 [60.1] Approx. 300 (Lead wire length) 1.5 54.5 1.5 1.5 111.5 [115.9] 91.9 [96.3] 109.7 98.6[103] 79 [83.4] 0.8 94.9 96.8 0.8 82 53

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

Direct Solenoid

Perl t Nns 4024 ilVS /1034 l'll/S 4044 2 PGition 3 Podtoo 2 Posilion 3 Poition 2 Poition 1121.42244324,4424 r13,,42344334, 4/|i|{ 4144,4244 12 VDC A06-51 AO9-51 A07-51 A10-51 A08-51 24 VDC A06-52 409-52 A07-52 A10-52 A08-52 48 VDC A06-53 A09-53 A07-53 A10-53 A08-53 Powar Conaumptlon: (13.2 WEtts) D.C. solenoidE alwaF draw the same amount of powsr, regardless of th6 posltlon of the plunger

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

D1 D1 L3 M D2 L2 L1 M T D2 L2 L1 T Metric Size Min.

Information

L6 A Note) Model Applicable tubing O.D. d H Weight (g) D L1 L2 L3 L4 L5 M T Min. Max. Min.

Speed Controller with One-touch Fittings

Component Part Component Parts No. 1 Description Bracket Steel strip Material No. 1 2 3 Description Bracket Cross recessed round head screw Clasp Material Steel strip Steel wire Steel strip 617 AS Series Dimensions L7 L8 Lock nut L6 L5 Applicable tubing O.D. d D2 through D3 D4 L4 D1 L3 L2 M1 M1 L1 Metric Size MAX.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

2 Meter-out type Meter-in type 638 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Dimensions: Elbow Type Seal method: Gasket seal For Uni thread Indicator window direction: 0 Indicator window direction: 180 W1 X W2 Y D3 AS-F AS-F Applicable tubing O.D. d TMH ASD AS L3 A L4 D1 AS-FE KE AS-FG L2 L1 M1 AS-FP H (Width across flats) T AS-FM Metric Size [mm] Model d T H

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

IDX-OM-W093

REFRIGERANT) IDF60-20) W R 0001 (2018 4 ) W R 0001 2018 2019 2020 2021 W X y Z 1 2 3 4 o P Q R o 1 Z 12 A Z IDF60/70/80/90 Series 1-5 IDX-OM-W093 1.3 HFC 1-5 IDF60/70/80/90 Series 1-6 IDX-OM-W093 1.4 / 1 1.5 () IDF60/70/80/90 Series 1-7 IDX-OM-W093 IDF60/70/80/90 Series 1-8 IDX-OM-W093 2 2.1 IN OUT (ONOFF ) 6-4 6-4 IDF60,70,80,90-20 IDF60,70,80,90-30 AC200V AC200V L1 L2 L3

IDX-OM-W035

122 F(50) 122 F(50) OUT IN (IN) (OUT) 2 2 4 10mm(3/8inch) IDFB Series 2-2 2-2 IDX-OM-W035 2 2 2 5 6-1 IEC ) [ 30mA IDFB22E,37E 15AIDFB55E, 75E 10A] 2) 0.3inch0.5inch (812mm) 16AWG (1.25mm IDFB22E, 37E 3 IDFB55E, 75E 4 4inch (0.1m) 98feet (30m) (3/8 10mm) IDFB Series 2-2 2-3 IDX-OM-W035 2 IDFB22E/37E 118138 mil (33.5mm) PE IDFB55E/75E 118138 mil (33.5mm) =M4X10 L1 L2 L3

High Power Cylinder:

GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5 61.5 B 32 36 44 53

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

HRX-OM-W038

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3