SMC Corporation of America
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AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

Table 3.8-2 RTU mode message frame Address c)Function d)Data e)Checksum a)Start b)Device (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (noncommunication time).

Remote modeOpen A The time of FLT alarmClose FLT Operation stop FLT alarm status signal B The time of FLT alarmOpen A The time of WRN alarmClose WRN Continuing operation WRN alarm status signal B The time of WRN alarmOpen ALM Alarm status signal A The time of alarmClose B The time of alarmOpen RDY TEMP READY signal A TEMP READY statusClose B TEMP READY statusOpen A EnabledClose FREZ Anti-freezing

HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

1 @3 A* A* Component Parts Material Description Remarks No. q w e Aluminum alloy Rod cover White anodized Aluminum alloy Head cover White anodized Enlarged view of A Aluminum alloy Cylinder tube Hard anodized Aluminum alloy Piston Chromated Hard chromate plated r Carbon steel Cushion spear A t Carbon steel Hard chromate plated Cushion spear B y Carbon steel Hard chromate plated Piston Rod

A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

1.5~2 SMC AF AR 4. 4-1 13 - 4-2 1 15 2 16 3 17 B 4 18 5 19 6 20 7 21 U 8 22 R 9 A 23 C 10 B 24 11 A 25 12 13 14 MHL2-10D MHL2-16D MHL2-20D MHL2-25D MHL2-32D MHL2-40D 26 27 28 29 30 NBR MHL10-PS MHL16-PS MHL20-PS MHL25-PS MHL32-PS MHL40-PS ) 262627282930 1 14 - 4-3 1 U U 2 R B B R 3 15 - 4-4 1 2 O O O 3 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku

Select the point of contact A of inlet pressure and max. air capacity in the graph. 2. AME650 is obtained when the max. flow line is above the point of intersection A in the graph. Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point.

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

ZF ZP ZCU How to Order Ejector Manifold AMJ ZZMA 06 06 R Misc. Number of stations Port and silencer location R L B 01 1 station Right side Left side Both sides 10 10 stations (max.) Note) Right and left side are viewed from the front side of VAC port.

HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

Displays exact the same pressure values for all channels. kPa MPa Auto identification function (page 14) Can automatically identify the pressure range of a connected P/A sensor. CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

2 1 Interior purge Package SRH Clean booth Class 100 Package 856 Clean Regulator SRH Series ARJ How to Order AR425 to 935 ARX 02 SRH 3 0 0 0 AMR Gauge port orientation ARM Body size 3 4 1/4 3/8 Nil: Standard ARP OUT IN Washing grade IR-A 0 1 Grade A Grade B Knob Gauge port IR R: R Specification Set pressure Gauge port 0 1 IRV 0.02 to 0.2 MPa 0.05 to 0.7 MPa OUT IN VEX Relief mechanism There

10m 1.5 1 1.5 1 A A m 1000 10 00 mm 1000 15m 15m 3m 3 3 B B 3 20m 20m 5 5m 5 C C 5m 100 100 200 200 300 300 500 500 600 600 700 700 400 400 800 800 900 900 1000 1000 LEFS16 LEFS16 LEFS25 LEFS25 ( R R LEFS32 LEFS32 S S LEFS 40 LEFS 40 LEFB 25 T 6N 1 1 5 00 DIN /O 16 16 25 25 32 1.5m 1 32 1 3 3m 3 5 5 5m ( DC24V ( DC24V A A NPN NPN 6N LECP6/LECA6 6N LECP6/LECA6 ( PNP

Going to Great Lengths with Polyurethane Tubing L G O B A S L N O P I R T O U D L O U S C T L S A B O G L Polyurethane Tubing Series TIUB & TU SMC Offers a Rainbow of Tubing Types, Colors, Sizes and Lengths Polyurethane has 8 Quick Ship colors, equalling 336 part numbers, stocked on the shelf and ready to ship in all available sizes and lengths.