Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: SV (S + V), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: Standard, Attachment: V (3-Port Valve for Residual Pressure Release), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

0.5

surface)) Low-noise fan: 48 dB(A) (Measured at a distance of 300 mm from the workpiece), Rapid static neutralizing fan: 57 dB(A) Offset voltage (Ion balance): 13 V With alarms for Incorrect high voltage, Maintenance warning With flow rate adjustment function (IZF10R) Based on ANSI/ESD-STM3.1-2006 standards 6 C O N T E N T S IZF21/31 IZF10/IZF10R Technical Data IZF21/31 Series IZF10/IZF10R

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AFF

B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AFF75B 1 2 13 42 348 220 57.5 220 10 AFF75A to AFF220A/Dimensions 3-20 holes For anchor bolt mounting Label Drain Rc ORIENTATION G 184 184 236 12B AFF220A 4BJIS10k flange 500 1291 1070 670 325 282 Model A 8B B 380 380 450 C 1125 1125 1178 D 935 935 980 E 505 505 540 F 265 265 265 Port size AFF75A AFF125A

Pilot Operated Regulator AR425 to 935 Series

Note 2) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a sealant tape for sealing.

VVXA21/22

VN LVC LVA LVH Variations LVD LVQ Valve Material Base, Body Seal Aluminum NBR, FKM, EPDM LQ Common SUP Individual SUP Common SUP Individual SUP Port A Port A Normally closed (N. C.) LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.)

90

Flow Rate Characteristics Relief Characteristics IR2020-02-A Supply pressure: 0.7 MPa IR2020-02-A Back pressure: 0.7 MPa ARJ 0.7 0.7 0.6 0.6 AR425 to 935 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 ARX 0.4 0.4 AMR 0.3 0.3 0.2 0.2 ARM 0.1 0.1 ARP 0 0 500 1000 1500 2000 0 0 150 300 450 600 IR-A IR-A Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] IR IRV Pressure Characteristics VEX Supply

ALF400 to 900, ALT-5/-9

hole Applicable tubing O.D. 6, I.D. 4 Applicable tubing O.D. 6, I.D. 4 Model Number of distribution ports Applicable tubing A B C Number of distribution ports Applicable tubing A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which

Series SYJA300 3 Port Air Operated Valve

(Value in the initial stage) Vibration resistance: No malfunction occurred in a one-sweep test between 8.3 and 2000Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF. (Value in the initial stage) SYJA312 4 SYJA32 2 4 (A) 2 (A) 2 How to Order Manifold Base 1 (P) 3 (R) 1 (P) 3 (R) N.C. N.O.

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: B (Bracket), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: B (Bracket), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: B (Bracket), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 6CR (6 + C + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: B (Bracket), Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: CR (C + R), Semi-Standard 2: Standard