CLQ

5 !

CP95

speed 500 mm/s.

CP95

5 !9 i *1 *1 C95K32 A A-A A !2 !

VCW

W (44) (Y) Z (X) (V) T R T 25 IN port 23/8 l =280 l =300 : Thread type 2.5 (N) E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 H H P = J (Pitch) 2 n-1/8 : Thread type L Dimension

SZ3000

Manual override 5 6 V S R 24VDC Nil: Non-locking push type D: Push and turn locking type Screw driver operated 12VDC 6VDC 5VDC 3VDC Common specifications Pos. common Nil N Neg. common Electrical entry M: With lead wire (length 300mm) MN: Without lead wire MO: Without connector Light/Surge voltage suppressor Without light/surge voltage suppressor NIL N Nil S Z With surge voltage suppressor

High Power Cylinder:

2 @5 !7 @1 !6 !5 w o !0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

NCA1

to 60C) 40 to 140F (5 to 60C) 0 to 140F (5 to 60C) Ambient & fluid temperature 2 to 20 in/s CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod

NCA1

to 60C) 40 to 140F (5 to 60C) 0 to 140F (5 to 60C) Ambient & fluid temperature 2 to 20 in/s CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

ZSE1/ISE1

m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

High Power Cylinder Series RHC

Cushion adjustment (relief adjustment) labor is the same as general purpose cylinder adjustment (cushion needle adjustment). 200 150 Cushioning quality (RHCF40-500, load weight 5kg, supply pressure 0.5MPa, horizontal drive) High power cylinder 500 General purpose cylinder Cushioning capacity [J] 100 1000mm/s 3000mm/s 2000mm/s 500mm/s 400 Stroke [mm] 300 50 200 100 50mm/s 20 25 32 40 50 63

Compact Electric Actuator Series LG1

Z 10 COIN 20 OZ + OZ 14 GND VDC 12-24V 13 COM 4.7k Torque monitor Zout 4.7k 12 + IM VDD 30V MAX 15mA MAX 11 Speed monitor Zout 4.7k 4.7k SP + 21 CZ Z (Pin 14 is GND) 26 FG CN I/F 12 Series LG1H High Rigidity Direct Acting Guide Type Nonstandard Motors/Mitsubishi Electric Corporation Drivers Dimensions (Without RS-232C option unit) 100 40 1-5 hole 5 5 5 5 120 130 5 5 Summary of input/

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size (Mounting side should be processed according to the dimensions below.)

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Payload W (kg) 9-14-7 8 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size

VXD21/22/23

3 8 1 2 3 4 S L, Z S L, Z S Note ) Thread PB 1 32A 40A 50A AC Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

Compact Cylinder

The length of wiring to the load is 5 m or more. 3. The load voltage is 100 VAC. The contact life may be shortened. (Due to permanent energizing conditions.) L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Solid state switch: Manufactured upon receipt of order as standard.

MGC

5 !6 !7 !8 No.

-fl Seies

S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12