Clean Air Module

70 80 60 0.2 MPa 50 60 40 40 30 20 20 10 0.1 MPa 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) LLB4-1-P1R1VSF: High Flow Type (500 L/min) 500 600 Set pressure 0.4 MPa 0.3 MPa 500 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 400 400 300 0.2 MPa 300 200 200 0.1 MPa 100 100 0 1 2 3 4 5 6 7 8 9 11 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid

Pneumatic Transfer System Series MF

bore, depth 5.5 From back 2 x 2-M6 x 1.0, thread depth 12 4 2-M8 x 1.0 Adjustment bolt 36 60 6 15 66 15 66 32 69 68 52 1 0 10 6 (absorber stroke) 36 2-RB0806 shock absorber M8 x 1.0 0.5 (difference in level) 93 Note) Rc(PT) 1/8 Cylinder port 174 + Stroke 6 6 2-7 through 52 82 15 28.5 M5 x 0.8 Hexagon socket head plug 25 36 8 48.5 48 59 60 52 44 40 SMC 11 (width across flats) 11.5 Body (Support

Compact and

Type L Type S Type L ZU05mA 0.5 90 48 7 13 14 6 One-touch fitting ZU07mA 0.7 11 16 28 Rc1/8 1 Supply pressure: 0.45 MPa ZUmA Series CAT.ES100-118A In-line Type Vacuum Ejector ZUmA Series RoHS Precautions How to Order ZU S 05 A Be sure to read this before handling the products.

ZMA

80 80 80 Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption Air consumption Vacuum pressure (kPa) Vacuum pressure (kPa) 65 65 100 65 100 65 Air consumption Air consumption Air consumption Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure 80 80 53 53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction

Suction Guard (Produced upon receipt of order) FHG Series

130 130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 90 90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130

Coolant Valve

5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100 LXPBABC

Single Axis Electric Actuator Series LJ1

5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100

Electric Actuator Triple Axis P&P Unit

E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 12 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 39 L 130 4H10depth5 4-M6 x 1depth14 4-M8 x 1.25depth18 80 31 5 4H10depth5 92 B section detail (S=2/1) B (Stroke+145) 25 18 (52) Stroke+188 (92) 10 10 Stroke+240 60 2 60 31 62.5 Reference plane 130 63.5 3 40 (Refer to

Rotary Actuator/Vane Type

(Example) For M3: L1 = 6 mm Q1 = M L1 = Applicable shaft types: S, Y L2 + (3 x P) L2 = Q2 = M Applicable shaft types: S, Y [mm] [mm] CRB2, CRBU2 Q1 S Y 10 Not available 15 M3 20 M3, M4 30 M3, M4, M5 CRB2, CRBU2 Q2 S Y 10 Not available 15 M3 20 M3, M4 30 M3, M4, M5 Shaft type Shaft type Size Size Symbol: A33 Symbol: A34 Machine female threads into the short shaft.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

L A N 4 9 . 3 ) 0 0 1 ( 6 5 . 3 1 ) 5 . 4 4 3 ( 8 4 . 2 ) 3 6 ( 2 r o t u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t

SMC Electronic Switch Series Variations

ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Application Examples Robot handling Palletizing Automobile Case packer 254 Vacuum Pad with Ejector ZHP Series 63, 80 RoHS ZK2 How to Order ZQ ZHP 80 BM N B 00 Without ejector ZR ZB ZHP 80 BM N B 10 C6 S With ejector ZA Pad diameter Exhaust release ZX 63 63 80 80 S Silencer exhaust ZM Supply (P) port Pad form Symbol Type Port size C4 Metric 4 One-touch fitting C6 6 One-touch fitting N3 Inch

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PF2D

1319 1913 19 IN side 4 4 5 (With reducer) 5 (With reducer) LQ1 fitting size: 5 59 1 39 12.7 LQ1 fitting size: 5 19 1S PF2D540 S (197) 86 56 1 39 19.05 19.05 With LQ1 fitting Size OUT side 5 6 (With reducer) 5 6 (With reducer) IN side 5 5 6 (With reducer) 6 (With reducer) Model 19 1925 2519 25 LQ1 fitting size: 6 56 1 49.5 392 Made to Order Related Products How to Order Fittings for a

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table

PSxx-OMM0006CN

ON ON (/ /) 1 OFF OFF DC(+) DC(-) 2 ON DC(+) DC(-) NPN PNP () 3 OFF ( ) () DC(+) DC(-) () 4 5 () (A/D ) ( ) 6 1015 10 -55No.PS-OMM0006CN-E No. 80 mA () (Er1,2) (Er1,2) (Er0,4,6,7,8, 9) "HHH" "LLL" (Er3) () DC1224 V10 DC1224 V 10 (Er0,4,6,7,8,9) 7 (HHH) (LLL) (Er3) 7F.S. (3.5F.S.) DC1224 V10 DC1224 V10 DC(+) DC(-) 8 -56No.PS-OMM0006CN-E No.

Title not found

Line No. 90 L Adapters Male to Female X2 S/S . P3, L10 X3 S/S . P3, L10 X4 S/S . P3, L10 RX3-2-3-2 S/S. P4, L12 RX3-1-1-1 S/S. P4, L12 M8-6x6-8 S/S . P20, L78 Y8 S/S . P4, L14 3/8BK-6 S/S . P18, L69 C1 S/S. P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S .