Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

36 (mm) Without rod boot With rod boot Bore size (mm) P l R S T V W X Y H ZZ e f h ZZ 40 1/4 37 106 11 7.5 8 27 8 66 207 55 25 92 233 50 3/8 43 112 11 10 9 30 10 73 225 60 28 99 251 1/4 stroke 63 3/8 47 116 11 12 10 37 10 80 243 65 30 106 269 80 1/2 57 127 11 16 13 40 13 90 270 80 32 116 296 100 1/2 66 137 12 20 16 47 13 100 299 100 35 123 322 1/5 stroke 125 1/2 77 137 12 20 16 55 15 100

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Speed Controller with Indicator

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

LX Series Compact Electric Actuators

Deflection quantjiyat the point inclicated with arrow in lhe extended state of slide lable when load is oiven to that Doint. ' l I [--, T ] Oeflection qqantiiy at the poinl F' in the rehacted stale oi slidelable when load |s given 10 the pont 'A' t t r rer ffi tdLr=150mm 60 + t' 3 ! ! 1 0 E : t 50 8 40 6 30 9 4 20 2 l 0 n E .1!

CLS

Without rod boot With rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l P S N RR T U V W Z ZZ f h Z1 ZZ1 S e MA MB MM Z 383 ZZ 412 Z1 406 ZZ1 435 35 35 39 39 39 49 1/2 1/2 3/4 3/4 3/4 1 29 32 36 44 44 55 5 5 5 35 40 45 50 50 65 98 30 30 30 383 412 40 40 40 45 45 55 30 to 1000 75

HRL

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 323 C O N T E N T S HRL Series Dual Channel Refrigerated

Lightweight and Compact

Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

MRHQ

40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MHS MRHQ16 MRHQ16 MHC Internal gripping 60 60 Pressure 0.2MPa MHT 50 50 Pressure 0.2MPa Overhang H mm Overhang H mm MHY 40 40 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.3MPa MHW 0.5MPa 0.5MPa 0.6MPa, 0.7MPa 0.4MPa 20 20 0.6MPa 0.5MPa MRHQ 10 10 Misc. 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping

C95Series

S; 6 7 8, 'I. " ,. 17, Piston gasket NBR PISton reiainel Urethane Cus/lion varve Steel wire Nick:091 Plated Steal for spring Snap ring 40't>100 Tie rod Carbon steel Uni-ctlrOfnatoo Tie roo nut Carbon sleej N """ ~laJM ROd end nut Carbon steel Nk:kel plated Seal Kit List -_slze(mm) Seal kit part humber Contents 32 MBW32-PS 40 50 MBW4()..

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

MY2H X168 Bore size Stroke Auto switch Symbol Stroke range: 51 to 599mm MY2H XB10 Bore size Stroke Auto switch Symbol Series/Bore size 16 25 40 High precision guide type (Single axis) High precision guide type (Double axis) Nil T Series/Bore size 16 25 40 High precision guide type (Single axis) High precision guide type (Double axis) Nil T Example) MY2H40G-300L-A93-X168 Example) MY2H40G-

Basic Type/Direct Mount Type

6 t !0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

VCC

Description Symbol A B C D E Description For piping 12 x 9 40 swivel elbow For piping 10 x 8 40 swivel elbow For piping 10 x 7.5 40 swivel elbow For piping 8 x 6 40 swivel elbow For piping 6 x 4 40 swivel elbow Part no. VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Compressed Air Preparation Filter

q w OUT IN t e Component Parts No.

High Vacuum Angle Valve

Temperature distribution of the 120C specification Comparison with a KF25 flange 140 e, r, t 120 eBody 1 Temperature [C] 100 rBody 2 tBody 3 80 q, w 60 40 Heater wBellows 20 qValve 0 0 30 60 90 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Model A1 [mm] B [mm] Weight [kg] Conductance1 [L/s] XLA-16-2 40 108

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L2 K J M N t W H E Panel thickness (Max. t) J L1 W 12 19 10 12 6 8 10 4 6 19 LQ2P22 LQ2P21 14.5 N (M) 6 18 19.9 7 16 31 73 LQ2P52 LQ2P51 LQ2P42 LQ2P41 LQ2P33 LQ2P32 LQ2P31 (E) (E) 36 83 H 20.5 6 22 24 26.2 7 24 L1 Class 2, 3 42 34.5 95 82 L2 24.5 Panel aperture K 9 28 30 33.1 7 30 21 49 40 110 93 (M) 30.5 9 32 36 40 10 36 26 47 108 H Inch sizes Courtesy of Steven Engineering, Inc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

NPT NPTF Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate type, type 40, 41 manifold (With gasket and screws) Power saving circuit is not available for D, Y, DO, YO or W types.

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type