SRP

1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

SRP

1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

5 Port Air Operated Valve SYA3000/5000/7000 Series

SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.) SY5000-26-20A 1 set (Blanking plate assembly part no.) Operating pressure MPa The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

•

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

2–4

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

CUJ

1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Parts list Replacement parts: Seal kits (double acting) Contents Note No. Description Material Kit no. Bore size 1 Hard anodized Aluminum alloy 4 CUJB4-PS Cylinder tube 2 Above numbers 11, 12, 13 and an exclusive grease pack.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

VHS20/30/40/50

AC20 AC25 AC30 AC40 AC50 VHS20 VHS30 VHS40 VHS50 5-8-19 2 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Optional specifications Pressure relief 3 port valve Description Symbol B R Z Knob color: Black Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

AC20 AC25 AC30 AC40 AC50 VHS20 VHS30 VHS40 VHS50 Conforming to OSHA Standard Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50 How to Order 30 03 RZ VHS Optional specifications Pressure relief 3 port valve Description Symbol B R Z Knob color: Black Body size Flow direction: Right to left Symbol 20 30 40 50 Standard port size 1/8 3/8 1/2 3/4 PSI as unit displayed on label Note

Stations: 8 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 3 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: D Side, Thread: T (NPTF)