Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

A 1.5 12 11 12 6.6 6.6 6H9 ( ) depth 6 +0.030 0 B A 32 11.5 32 11.5 G (NN 1) x H H B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170

ZSM1-115/121

How to Calculate the Set Value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A (A B)/4 P2 = B + (A B)/4 Manual adjustment is possible after finishing in the auto preset mode. Ex.) When an error count (number of the failure predict) (EC) is set to be 3.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

AMH650 AMH850 3/4B/FF/10K 1B/FF/10K 290 AMH350 80 2B/FF/10K 11/2 B/FF/10K 305 312 AMH450 80 339 AMH550 80 391 AMH650 80 540.5 AMH850 80 Precaution Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-21

air-filter-e

A B How to Order Standard Elements B 200 E N 002 Model Determination Element symbol Symbol Element seal material/Operating temperature range Element seal material Non-asbestos Fluororesin Operating temperature range(C) 0 to150 0 to120 A Note) T N V 4 A NBR FKM 0 to 80 Symbol Element material 0 to 120 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Air Preparation Equipment

A B How to Order Standard Elements B 200 E N 002 Model Determination Element symbol Symbol Element seal material/Operating temperature range Element seal material Non-asbestos Fluororesin Operating temperature range(C) 0 to150 0 to120 A Note) T N V 4 A NBR FKM 0 to 80 Symbol Element material 0 to 120 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

PSxx-OMM0006CN

8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4

CLS

model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

48

B 0.2 A 0.2 Bore size A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 8.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Nil S n Mounting Bore size B A L F G D Through-hole (Standard) Both ends tapped Foot Front flange Rear flange Double clevis 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Mounting brackets are not mounted and are supplied loose at the time of shipment.

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

CEx-OML0058

B e g i n n i n g 1 0 0 200 200 I s t h e c y l i n d e r s k i n e t i c e n e r g y Wi t h i n t h e a l l o w a b l e r a n g e ? 1 0 0 80 100 100 80 63 L o a d w e i g h t k g f L o a d w e i g h t k g f I s t h e s p e e d w i t h i n t h e g i v e n r a n g e i n t h e 63 d i a g r a m ? A n d , w i t h i n 50 s p e c i f i c a t i o n s ?

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range Bore size (mm) ZZ ZZ FZ FY FX FT FD B Port 4-FD CS1 32 40 50 63 80 100 up to 500 157 149 79 32 64 10 7 50 up to 500 171 158 90 36 72 10 9 55 up to 600 188 176 110 45 90 12 9 70 FY B up to 600 188 176 120 50 100 12 9 80 up to 750 238 220 153 63 126 16 12 100 FT FX up to 750 238 220 178 75 150 16 14 120 ZZ

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Digital Flow Switch (Integrated display type) ( compatible)

. -24No.PF-OMW0010-D Examples of Internal Circuit and Wiring NPN output type PNP output type Max.28 V, 80 mA Internal voltage drop 1.5 V or less Max.80 mA Internal voltage drop 1.5 V or less NPN 2 Output type PNP 2 Output type Maximum 28 V, 80 mA Internal voltage drop 1.5 V or less Maximum 80 mA Internal voltage drop 1.5 V or less Used as IO-Link device : Numbers in the figures show the connector

Ejector Valve Unit Series ZYY/ZYX

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

XL-OMV0002

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14) 5 XL-OMV0002 2.2

Digital Flow Switch (Integrated display type)

The set values of auto-preset mode are calculated as follows Auto-preset set value Hysteresis mode Window comparator mode P_1 = A (A B)/4 H_1 = (A B)/2 (n_1 = B + P1L = B P1H = A H_1 = 5 digit 1 digit means the minimum set unit (In reversed output, P1L, P1H becomes n1L, n1H respectively) Set A B value 4 in reversed output mode) Refer to the list of output operations (page 26) for the setting