Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 100mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Air Pressure Lock-up, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewied Connector: 5m, Number: 3 pcs.

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 600mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: 3 pcs.

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 5m, Number: 4 pcs.

AMF

AMF650 AMF850 1 2 1 2 1 2 1 14-20-47 7 Series AMF Dimensions AMF801/901/800/900/1000 AMF801/901 ORIENTATION Label Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Model Connection (Flange) 2B 2B, 3B, 4B 400 A 280 B 6B C 550 D 150 E 270 F 823 G 3 H 797 J 620 AMF801

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

0.01

200 150 100 0 50 Supply pressure (kPa) Supply pressure (kPa) 870 Air Catch Sensor Series ISA2 Response Time (Typical example) Response time changes with detection distance and piping length.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

XL-OMV0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Modular Design with Uniform Body Style

-1-D Y510-m03-1-D Y610-m03-1-D Y610-m04-1-D Y54-m02-D Y54-m03-D Y54-m04-D Y54-m06-D Y34-m01-D Y34-m02-D Y34-m03-D Y44-m02-D Y44-m03-D Y44-m04-D Y64-m03-D Y64-m04-D Y64-m06-D Attachment Standard Y24-m01-D Y24-m02-D Cross spacer*5, *6 p. 53 Y34-m01-1-D Y34-m02-1-D Y34-m03-1-D Y44-m02-1-D Y44-m03-1-D Y44-m04-1-D Y54-m03-1-D Y54-m04-1-D Y54-m06-1-D Front and Y24-m01-1-D Y24-m02-1-D back port

Free Mount Cylinder

, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

42

U D U D Thread type Nil Rc F G N NPT T NPTF Refer to page 534 (Grommet type) for wiring specifications.