q"s models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection
S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .
pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.
Fluid Air/Inert gas Operating pressure 100 kPa to 1.0 MPa 5 to 60C (No freezing) Ambient and fluid temperature Flow characteristics 2 (NO) 3 (OUT) 1 (NC) 2 (OUT) 1.4 1.4 0.15 0.2 0.29 0.29 C [dm3/(sbar)] b Cv Lubrication Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)
C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?
C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?
C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?
C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?
C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?
C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?
Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 400 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF
Mounting bolt C D Flat washer Note) Note) Be sure to use the attached flat washer when mounting a cylinder with through-holes.
24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 23 - 7.CN3 1 1 DA CC-Link A 2 2 DB CC-Link B 3 3 DG CC-Link 4 4 SLD CC-Link 5 5 FG CC-Link CC-Link CC-Link 1105%, 1/2W CC-Link 1305%, 1/2W 24 - 8.CN1IF (CONT) 8.1 (LEC)12 LEC-CG1-1 LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c) M12 4pin
Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF
For single power supply use COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off 24 VDC 24 VDC COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 24 VDC 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed
(m) kilogram (Kg) 1 Kg = 2.2 lbs Volume* gallon (US gallon) liter (l) 1 US Gal = 3.71 l Temperature degrees Fahrenheit (F) degrees Celsius (C) C = 5/9 (F-32) Torque pounds (f) inches (lbs (f) in.) Newton-meters (Nm) 1 Nm = 8.88 lb(f)-in.
(m) kilogram (Kg) 1 Kg = 2.2 lbs Volume* gallon (US gallon) liter (l) 1 US Gal = 3.71 l Temperature degrees Fahrenheit (F) degrees Celsius (C) C = 5/9 (F-32) Torque pounds (f) inches (lbs (f) in.) Newton-meters (Nm) 1 Nm = 8.88 lb(f)-in.
Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free AME AMF Oil-free regulator Oil-free solenoid valve SUP Oil-free needle valve Line A Line B Example of clean air equipment Line B Line C Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Line C Clean precision regulator Stainless steel
Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide
C SM 3 Valve HNBR AR10P-090S 4 Piston assembly Polyacetal AR10P-150AS 5 Valve guide assembly Polyacetal 131329 A [AR20(K)-B to AR60(K)-B] No. Description Material Part no.