High Vacuum Angle Valve, XL Series Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.
Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.
Proper auto switch mounting position A B Auto switch model D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 Cylinder model CYP15 93.5 24.5 CYP32 122 33 Auto Switch Mounting When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.
Switches / Direct Mount Type D-Y7NW (V)/Y7PW (V)/D-Y7BW (V) Auto Switch Specifications D-Y7mW, D-Y7mWV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.
Switches / Direct Mount Type D-Y7NW (V)/Y7PW (V)/D-Y7BW (V) Auto Switch Specifications D-Y7mW, D-Y7mWV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.
I C o n s t a n t Function Sets integral time used for PID control/ M O D E < 1 5 0 s e c 5.5 How to operate 5-10 A_HEC-OM-K001-1.7 Chapter 5 Operation <6> D constant setting: Mode indication D Constant Default value: 0 sec. Setting range 0.0 to 99.9 sec. Indicated contents D constant (Derivative time) D Constant indicates that it is D constant setting mode.
D-R732C R73C Relay 24 VDC 5 to 40 mA PLC Relay 24 V AC/DC or less 50mA D-R801 D-R802 R80 PLC 48V AC/DC 40mA D-R8 IC circuit 100V AC/DC 20mA D-R801C D-R802C R80C Relay 24V AC/DC 50mA PLC D-S7 D-S791 D-S792 S79 28 VDC or less 40mA or less Relay D-S7P1 D-S7P2 S7P 80mA or less PLC D-S9 D-S991 D-S992 S99V S99 28 VDC or less 40mA or less IC circuit D-S9P1 D-S9P2 S9PV S9P 80mA or less D-T7 D-T791
Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24
i s p l a y a n d SigmaWin+TM 2.
D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state
D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state
A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV
D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. D C o n s t a n t M O D E < 0 . 0 s e c When 0 is set, this function becomes invalid. 8-8 Operation 7.
LEF Auto switch model D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Electrical entry direction In-line Perpendicular In-line Perpendicular In-line Perpendicular LEJ LEJ Wiring type 2-wire 3-wire NPN PNP Output type LEL Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) LEM Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC
Fluids VCC Series Union Nut Socket 1209 1008 1075 VCC-G-D-1 (Applicable fitting VCK ) VCC-G-D-1 2 13 Width across flats: 19 25.5 14 60 VCC-G-D-2 (Applicable fitting VCK ) 0806 0604 9 Width across flats: 17 20.5 14 50 For extending the socket VCC-G-D-1 VCC-G-D-1 VNA 113 VNB SGC SGH VCC-G-D-1 VNC VNH VCC-G-D-2 VND 97 VCC VCC TQ 655 VCC Series Disassembly/Assembly/ Maintenance Procedure Cleaning
D i agnosi s( D I AG ) Byt e 7 0 0 0 0 0 0 b0 b7 I nt ernal di agnost i c error 0: N o error 1: Error O ver range error 0: N o error 1: Error N ot e : Al t hough 100% F. S. f or t arget val ue i s 12bi t , com m uni cat i on i s avai l abl e up t o 150% F. S. ( accuracy i s guarant eed up t o 100% F. S. ) . O ver range error i s out put w hen 150% F. S. i s exceeded.
RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !
R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.