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C Chattering The problem of the switch output turning ON and OFF repeatedly around the set value at high frequency due to the effect of pulsation. D The setting time from when the input signal reaches the set value, to when the ON-OFF output actually begins working. Delay time setting can prevent the output from chattering.

For manifold type 31, S31, 32, S32 Body option 5 port 0: Pilot valve individual exhaust for the pilot valve 3: Common exhaust type for main and pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,

Note 7) The flow switch conforms to the CE mark. 1 Digital Flow Switch Series PF2A For Air How to Order PF2A5 Remote Type Sensor Unit 10 01 C Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Option (Refer to page 35.) None e-con connector x 1 pc. Nil N F Rc NPT G Nil C The cable and connector are shipped unassembled.

controller TYPE TYPE size size Without controller Nil Without controller Nil Left side Nil Left side Nil 25 100 AC servo motor (Inclemental encoder 25 100 AC servo motor (Inclemental encoder S2 S2 100 to 120VAC LECSA1 A1 100 to 120VAC LECSA1 A1 Right side R Right side R A1,A2 A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

to the D-B53/B54, D-C73(C)/C80C, D-A93(V), D-A73(C)/A80C, DA53/A54, D-Z73, and D-90/97/90A/93A only. 4) For reed auto switches M8 and M12 type with connector, please contact SMC. 5) The standard lead wire length of the trimmer auto switch is 3 m. 6) The standard lead wire length of the solid state auto switch with the timer except for the D-P3DW and D-M9A (V), water-resistant 2-color

C : Contents revised in several places. D : Contents are added. E : Contents revised in several places. F : Contents revised in several places.

Program Top entry Side entry U S * For "C" type manifolds only * For "C" type manifolds only * For use with 24VDC valves only.

entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80 140 150 204 235 175 185 305.5 341.5 210 240 17-4-26 7 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid Precautions Be sure to read before handling.

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

LPush-locking slotted style [D] While pressing, turn in the direction of the arrow. If you do not turn, the mechanism does not lock in position.

Allowable power supply fluctuation: 3 phase 200 VAC +/-10% (50Hz); 3 phase 200 VAC to 220V +/-10% (60Hz) Power supply cable specification Prepare the power supply cables below. Power supply cable: 10AWG (5.5mm2 or greater), cable O.D.

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

[dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14