Table of Contents

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Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

NCQ8

M2 bolt circle M1 W I dia.

Electric Actuator/Slider Type

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SMC has redesigned the CQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions. Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25,

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

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15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

2–4

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

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Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Bore Size: 32mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: None (for 12-25 Bore w/o Magnet; 32-100 Bore w/o Magnet Z must be selected), Auto Switch: M9B--Solid State, Gen.

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Bore Size: 32mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 45mm, Body Option: with Rubber Bumper, Auto Switch Groove: None (for 12-25 Bore w/o Magnet; 32-100 Bore w/o Magnet Z must be selected), Auto Switch: M9B--Solid State, Gen.

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Bore Size: 32mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 50mm, Body Option: C+M, Auto Switch Groove: None (for 12-25 Bore w/o Magnet; 32-100 Bore w/o Magnet Z must be selected), Auto Switch: M9B--Solid State, Gen.

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Bore Size: 32mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: C+M, Auto Switch Groove: None (for 12-25 Bore w/o Magnet; 32-100 Bore w/o Magnet Z must be selected), Auto Switch: M9B--Solid State, Gen.

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Bore Size: 32mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Body Option: Rod End Male Thread, Auto Switch Groove: None (for 12-25 Bore w/o Magnet; 32-100 Bore w/o Magnet Z must be selected), Auto Switch: M9B--Solid State, Gen.