E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow
314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI GFCI R GFCI R R L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11
1ANR 2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) 6-3 IDU22E75E A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E
Note 2: Air flow capacity converted by the compressor intake condition [32C, atmospheric pressure, and 75% relative humidity]. Note 3: Do not use this product with continuous voltage fluctuations. Note 4: These values are reference values under rated conditions and are not guaranteed. Do not use these values for the thermal set values, etc.
washer) B VNH1-16 VNH2-16 VNH3-16 VNH4-16 How to Order Pilot Solenoid Valves VO301-00 T X302 Light/surge voltage suppressor Rated voltage Nil S Z L With indicator light None With surge voltage suppressor With light/surge voltage suppressor 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 4 220 VAC 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D
Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.
Be sure to loosen the locknut before adjusting the knob by hand. r After adjustment, tighten lock screw for tamper proof operation, Fluid-Air/Supply 1 05psig (7 kgt / cm2l NSR 1110 to-32^lrn {l',151 NSR 3110 NSR 4110 %tlPf 75 75 g q 6 0 il IJ I 6 a 60 d 5 F "ff 45 * 3 0 d 30 1 5 0 o o 7 1 4 2 1 2 A 3 FWSSM P r e ssur e C -lwr a ct eri st i e s Supply pressure 1OOpsig (7kgt/cm2l, Secondary
IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20
Precision measuring equipment (3-D measuring machines) Semiconductor manufacturing equipment Semiconductor inspection equipment Dental equipment Chemical analysis equipment Ozonizers, Hydrogen gas generating equipment Air (oxygen, nitrogen, etc.)
/M9P/M9B 1575 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B 1576 D-F9G/F9H (Normally closed) 1577 Direct Grommet D-Y59A/Y59B/Y7P 1578 D-Y69A/Y69B /Y7PV General purpose D-Y7G/Y7H (Normally closed) 1579 D-M5N/M5P/M5B 1580 D-H7A1/H7A2/H7B 1581 Grommet D-G59/G5P/K59 1582 D-H7C Band Connector 1583 D-G39/K39 1584 Terminal conduit D-G39A/K39A 1585 D-F79/F7P/J79 1586 Grommet D-F7NV/F7PV/F7BV Rail 1587 D-J79C Connector
Printed in Japan. 1st printing October, 2000 D-SMC.L.A. P-80 (D)
(RedGreenRed) D-Y7BWV D-Y7BW D-Y7NWV D-Y7NW D-Y7PW Perpendicular D-Y7PWV Auto switch part no.
from the 1st station on the D-side.
from the 1st station on the D-side.
(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)
Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]
Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]
Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]
Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]