AMD

AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

AC Servo Motor Driver (Pulse input type/Positioning type)

When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). 29 - LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio) ratio 4/7) Parameter *1,*2 Para.

Table of Contents

2-M5 x 0.8 (32: Rc 1/8) Rod end nut Rod End Nut/Accessory Material: Carbon steel Width across flats L 2P through Part no.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

VNl VQ 4.3-3 2 Port Solenoid Valve SeriesVQ20/30 For Dry Air, Pilot Operated Single Unit How to Order Valve VQ A C6 2 1 1 1 G Series/Orifice Option Series VQ20 VQ30 Effective orifice 3.4mm 4.8mm : None Symbol 2 3 F: With bracket Switching N.C. (A) 2 L: L style (VQ20 Only ) 1 1 (p) Note) Consult SMC if N.O. is desired. Note) If ordering both options, indicate "LF".

Modular Type Lubricator Series AL

3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(or 3 kPa) Repeatability Note 2) Ex.) ARP30-02BG For 0.4 MPa setting 1 l/min (ANR) or less (at P2 = 0.4 MPa) Air consumption Ex.) ARP30-02BG-1 For 0.2 MPa setting 0.6 l/min (ANR) or less (at P2 = 0.2 MPa) Ex.)

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I Filiing type Filling type ' '''2 I URJ Yo A2 URJ ~ 8 2 I TSJ ';; 92 TSJ 1 ,1 Switch type r ""26 Analoa 3,wI(e L I G(ommGI : 3m 26 Analog 3-wlre 2.7 2 output (NPN) 4wire 27 2 output (NPN) 4-wire __~7 2 output (PNP) 4'Wlre 67 2 output (PNP) 4wire Internal Circuit and Wiring 26 analog output type -27 type NPN open collector 67 type PNP open collector -Reel Po."!

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

PSxx-OMT0001CN

0.4MPapsi 0.4MPapsi 5 10 N 1 2 3 4 5 6 1 2 NPN2 PNP2 P 6 10 3 4 0.2MPapsi 0.2MPapsi 10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

PSxx-OMR0001CN

0.4MPapsi 0.4MPapsi 10 5 N 1 2 3 4 5 6 1 2 NPN1 PNP1 P 10 6 3 4 0.2MPapsi 0.2MPapsi 7 10 4 5 6 M 5 SI 10 8 1 7 L 7 L N S 6 7 8 R 6 7 8 T 2 9 B -9No.PS-OMR0001CN-J 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMR0001CN-J 2 / (2 2 2 1 ) ((38)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

VKF300

. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Model Note) Rated flow (l /min (ANR)) 300 750 1500 2200 3500 6000 12000 Port size (Nominal size B) , , , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

MRQ

/2 70.5 ( 40 stroke) /2 75.5 ( 50 stroke) /2 75.5 ( 65 stroke) /2 80.5 ( 75 stroke) /2 78 ( 90 stroke) /2 83 (100 stroke) /2 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.