COQ2BP

L, ' N X NZ NX NZ L, P i A A 0ND. o oNDI1'o A, U, NX bJ AppI bore size A ., E, 11 MM 'R, U. -. . No. CQ2 Single Rod Clevis (mm) C02 Double Rod Clevis (mm) ;1 AppI bon ... A A, E, b MM -110 U, HDHa HX 50,63 56 ,. 028 0) Ml8x1.5 I. 20 ' 4 i 010 22 ~3 ~., Pan No. NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

L o a d F ' t _ .

ZB-OM00301

V Assy ZB1-VPN3--A KJ-C1 ZB1-FE3-A 30m 10 1 ZB1-SE1-A 10 1 Assy ZB1-PS-A Assy ZB1-ZS-A Assy ZZB26 - No.ZB-OM00301 () ZB1-VQ110U() ZB1-VQ110LZB03 ZB04 ZB05 ZB06 ZB00 () ZB1-VQ120U() ZB1-VQ110 K1 N.C. N.C. () () () () () () () () () () J1 N.C.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Load is an analog input equipment such as a voltmeter.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Manifold Regulator ARM1000/2000 Series

Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272

ALF400 to 900, ALT-5/-9

AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63

XL-OMY0001

Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3

A large digital display provides a clear view of the current and set values. 

A large digital display provides a clear view of the current and set values. 

A large digital display provides a clear view of the current and set values. 

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, with Rc-NPT Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+K

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, with Rc-G Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+K

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, with Rc-NPT Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+D+K

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, with Rc-G Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+D+K

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+K

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, with Rc-NPT Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+K+M

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, with Rc-NPT Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+D+K+M

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+K+M