XLAQ/XLDQ

26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface Symbol Nil

ITV

L-bracket 2.3 30 36 52 40 22 Straight type 3 m Cable connector TM-4DSX3HG4 50 Right angle type 3 m 4 x 5.5 8 x 4.5 4 x 7 22 TM-4DLX3HG4 50 36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 14-8-15 16 Series ITV1000/2000/3000 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

40 to +80C 25 to +60C 40 to +80C Cable 25 to +60C 40 to +80C 25 to +60C 40 to +80C Min. bending radius (Fixed) 40 mm 21.7 mm 40 mm 21.7 mm Protection class IP67 (Only with screw tightened) Allowable repeated insertion/withdrawal 200 Material of knurl Brass (Nickel plating) Zinc die-cast (Nickel plating) Brass (Nickel plating) Zinc die-cast (Nickel plating) Contact (Surface treatment) Phosphor

MXF

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

Series VQ Metal Seal/Rubber Seal Body Ported

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

CEx-OMQ0011

ML2B32 15N Va 0.25m/s 0.5MPa L1 0.05m L2 0.05m W W 1 L L1 W W W M We M3 V M1 V <> W max=60N( Va P 19) a1= W = 15 =0.25 W max 60 M 2 max=2Nm( Va P 19) a2= M = 0.75 =0.375 M max 2 <> We=1.410VaW=1.4100.2515=52.2N M max=3.5Nm( V=1.4Va) M 3 WeL 1 =52.50.05 1 =0.88Nm 3 3 a3= M 3 = 0.88 =0.25 M 3max 3.5 M max=12Nm( V=1.4Va) M 1 WeL 1 1 =52.50.05 1 =0.88Nm 3 3 a4= M 1 =

Microspeed Cylinder

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (

MXH Series Compact Slide

D-A9 D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

NCQ8

M2 bolt circle M1 W I dia.

Pulse Valve

Because of this, the air flows to the OUT side. q w Caution Selection of Pilot Valve p. 3 Energized (Main valve open) Due to the release of air from the pressure action chamber w, the pressure in the pressure action chamber w decreases (force pushing the main valve down < force pushing the main valve up), opening the main valve.

rep-modular-e

8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CJ2

Component Parts No. q w e r t y No. u i o !0 !

SMC Pneumatic Clean Series

Bore size (mm) Cushion valve Width across flats (mm) Socket wrench JISB4648 Hexagon spanner wrench 1.5 20, 25, 32, 40 1.5 snap ring 21 Series CM2W 10-/1121-/22Double acting, Double rod cylinder/ 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 H7B 21 C D M 2 W L 40 150 H7B Nil Built-in magnet Number of auto switches 2 pcs. 1 pc.

Modular Type Regulator Series AR

w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151

XL

(dual operation) XLA-40 Normally closed XLC-40 Valve type Model 600 600 400 400 T msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve