Non-standard Motor/Horizontal Mount Specification Series LJ1H10

60 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 60 Non-standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

39

L M N O P Q R K L M N O P Q Part no.

SFOD-OMT0009CN

LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111 No.SFOD-OMT0009CN-B Revision history 2015 9 2019 3 C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo

Lightweight and Compact

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

Fluoropolymer Piping Equipment

39 10 10 LQ1L5B-Ml 1/2" 9 LQ1L5C-Ml 3/4" 15 LQ1L5D-Ml 1/2" 9 LQ1L5E-Ml 3/8" 20 17 44 39.5 23 5.8 LQ1L5F-Ml 1/4" 3.6 LQ1L5H-Ml 3/4" 3/8" 34 39.5 36 53 40 49 8 8 LQ1L6A-Ml 1" 3/4" 35 39.5 36 68.5 46 49 16 16 LQ1L6B-Ml 3/4" 15 LQ1L6C-Ml 1" 1" 22.5 21.2 LQ1L6D-Ml 3/4" 15 LQ1L6E-Ml 1/2" 37 29 26 60 47 39 9 LQ1L6G-Ml 1" 3/8" 34 39.5 36 53 40 49 8 8 1/2" 10 3/4" 16 29 26 54 40 39 10 10 LQ1L52

Thermo-chiller

2 Contact input signal 1: Run/Stop (Default setting) 4.7 k 1 k 3 Contact input signal 2: External switch (Default setting) 4.7 k 5 SD+ RS-485 communication 6 SD Internal circuit 7 SG 9 24 COM Circuit diagram Contact output signal 1: Operation status (Default setting) 10 Contact output signal 1 COM 11 Contact output signal 2: Alarm signal (Default setting) 12 Contact output signal 2 COM 13

53

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

CHKD/CHKG

e b a Lh + Stroke S Q Rod end male thread ZZ + Stroke F with effective thread depth G LC 2 x K through 4 x L counter bore M H 4 x CD LW D LH LT X1 X1 B + Stroke BB LX E Y1 SS Z + Stroke LA + Stroke (mm) Bore size (mm) LW LA B BB LC F L CD D E G H K LH LT LX 20 25 32 40 50 63 80 100 76 6.6 9.5 depth 5.4 44.5 43 12 70 10 18 10 M8 x 1.25 6 5.5 23 15 58 78 6.6 9.5 depth 5.4 45 14 76 12 18 12

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Fieldbus System

type) H Nil R Internal pilot External pilot R U S Z NS NZ For K and H, mounting screws do not fall out from the valve.

Series VQ Base Mounted Metal Seal/Rubber Seal

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.

CS1

105 M30 X 1.5 30 39 69.5 4 CM2 86.5 5 4 X 40 40 32 28 8 60 55 110 M36 X 1.5 34 39 76.5 4 94.5 5 4 X 40 50 40 32 8 67 70 125 M40 X 1.5 44 42.5 84.5 4 C85 180/200 250 300 5 4 X 55 115 50 40 8 67 70 125 M45 X 1.5 44 40 42.5 105 4 6 5 X 65 144 9 86 160 66 63 75.5 M56 X 2 53 50 132 50 5 CG1 6 5 X 80 178 9 175 71 84.5 M64 X 2 66 105 166 80 63 63 5 Y type double knuckle joint Rod end nut MB C95

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

PF-OMN0009_C

N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -13No.PF-OMN0009CN-F FLOW POWER (OUT ) M8 1 DC+ (4 ) () 2 NC/ () () 3 DC() 4 (IN ) () M8 IN OUT POWER FLOW POWER FLOW -14No.PF-OMN0009CN-F

Air Cylinder CP Series Cylinder Positioner Assembly

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

Title not found

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

VZS

Note) K plug connector DIN terminal 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC FS Plug-in With surge voltage suppressor D DIN terminal/With light /surge voltage suppressor KZ K plug connector With light/surge voltage suppressor DZ 6 12 VDC 9 Other KS K plug connector With light/surge voltage suppressor Note) Since F and K types are attached without lamp cover, it should be arranged