8

8 ZSE ISE PSE Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 Glossary of Terms IF Data Technical Information 16-13-1 9 Glossary of Terms A I R Absolute pressure Accuracy Analog output function Auto preset function Auto shift

ZSE2/ISE2

1 Compact Pressure Switch Series ZSE2/ISE2 For Vacuum For Positive Pressure ZSE ISE PSE For General Pneumatics Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.

VNB

VXA I (DIN terminal: D) VN Main port Rc A Model B C D E F G H I J K L M N P Q R S T U LVC VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 52 26 4.5 24.3 2.3 25 34 55 LVA 80 90 50 60 35 40 17.5 20 84 100 92 108 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154 170 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 LVH Port size

VM

.=2.5mm only, w/threads Plunger Spring Valve rod Body u i w e Stainless steel Lever Valve NBR o NBR Packing r Polyacetal Retainer t Stainless steel Spring !

2/3 Port Valve

AC Note 1) Surge voltage suppressor is attached to the lead wire. 4.1-87 VXH Construction/Dimensions Material C3771 Note No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CDQ2BP series

JIS cass 2 Standad @w $enhs C[028 Distance From Auto Switch Side Face e1 ili-l ffi 7T\ '1 (f|/ l r : 1 1 Distance From Auto Switch Top Face : t l . : : : : : : : . . 9 ^ ^ .9 o t2 ,r,rl fl^l rtu 1 0 : : : : : : : : : , : : azw, 7 Sg|'ies C[028P flislr ilrulrtric rierd Rt$i$h Through Hole Mount:CDQ2BPtrnDM-n I Note Eemale lhredd and rod drmensrons are the same as for clevis and head llange

2/3 Port Solenoid Valve for Chemicals

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

MGP

6 o i !0 !8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(PNP) 3 I/O cable (3 m) 5 I/O cable (5 m) 7 Screw mounting 8*3 DIN rail E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link M CC-Link Ver. 1.10 5 Parallel input (NPN) 6 Parallel input (PNP) For single axis *4 Select Nil for anything other than DeviceNet, CC-Link, or parallel input.

Lock-Up Valve IL201/211/220 Series

2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !

Thermo-chiller/Rack Mount Type

4 i !5 !9 !6 !7 @0 @1 !8 No.

EXxx-OMS0026CN

/OFF ON ON ON ON ON ON ON ON DHCP 2 ON/OFF OFF OFF OFF OFF OFF OFF OFF OFF Remote Control 1DHCP IP IP 2Rockwell Automation BOOTP/DHCP Server Enable DHCPBOOTP/DHCP Server IP IP Disable DHCPBOOTP/DHCP Server IP -19No.EX-OMS0026CN BOOTP/DHCP Server IP BOOTP/DHCP Server EX600 MAC IP IP -20No.EX-OMS0026CN LED LED ST(M) PWR PWR(V) MS NS L/A IN IN L/A OUT OUT ST(M)-LED OFF I/

EX600-AX_AY_AM_eng

O unit Analog input or I/O unit Analog input or I/O unit (2) (3) Analog output unit EX600-AYA 24 V (output) 0 V (output) 0 V (output) Output FE Signal name End plate bracket (EX600-ZMA2) 24 V (control and input) 0 V (control and input) Input connector Input + Input FE Analog I/O unit EX600-AMB Output connector 5 24 V (output) 0 V (output) 0 V (output) Output FE Refer to the product catalog

LEF-OM006xx

. / 1 1 1 1 I/O (1 ) 1 1 (USB ) 1 -2.

CE

9 i Parts list Parts list Description Material Note Description Material Note No. No.

Series CE1

0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !6 Needle O-ring NBR Stainless steel 303 y !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !