5

4 6 6 4 8 6 4 21.5 2 0 2 [4.5] 2 0 19 20 10 7.5 2.5 10 7.5 4.5 10 7.5 25 6 3.5 1.5 [1] 6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.

One-touch Fittings

[mm] 2 x Applicable tubing 1 D D Weight [g] X (X) Y Nylon Urethane Oval type Round type 4 1/8 KQ2D04-01GS1 10 8.2 7.7 10 15.8 23.3 24.3 13.3 5.7 6 3.2 6 6 3.6 9.2 1/4 KQ2D04-02GS1 14 8.2 7.7 10 15.8 27.7 27.1 13.3 5.7 6 3.2 6 6 3.6 19 O 4, 6 8 to 12 N L1 M 6 1/8 KQ2D06-01GS1 12 10.4 9.7 12 16.8 24.3 26.4 13.3 6.7 6 3.2 13.9 11 5.4 10.2 1/4 KQ2D06-02GS1 14 10.4 9.7 12 16.8 28.7 29.2 13.3 6.7

Swivels

Nitrile Seals EP Seals Fluorocarbon Seals Size Kit Number Size Kit Number Size Kit Number -4/-6 RK-4/6N -4/-6 RK-4/6E -4/-6 RK-4/6V -8/-10 RK-8N -8/-10 RK-8E -8/-10 RK-8V -12 RK-12N -12 RK-12E -12 RK-12V -16 RK-16N -16 RK-16E -16 RK-16V D Swivels Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-33

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

Information

(mm) ASG32F-01 4 ASG42F-02 6, 8 ASG52F-03 6 ASG62F-04 Sealant: Special FKM Seat ring: Stainless steel 303 8 12 4, 6 8, 10 10, 12 Flow rate (l/min (ANR)) 460 790 920 1580 100 180 230 390 Controlled (free) flow 7 12 14 24 1.5 2.7 3.5 6 Effective area (mm2) Applicable tubing materials Note) Flow rate is measured at 0.5 MPa and 20C.

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

Fieldbus system EtherNet/IP compatible SI Unit

Bit line Bit Details 7 6 5 4 3 2 1 0 Time base Multiplier Bit 0 to 5: Multiplier (0 to 1) Bit 6 to 7: time base (00, 01, 10) Calculation condition Time base Time base value Calculation Cycle time 00 0.1 ms Multiplier x Time base 0.4 ms to 6.3 ms 01 0.4 ms 6.4 ms + multiplier x Time base 6.4 ms to 31.6 ms 10 1.6 ms 32.0 ms + multiplier x Time base 32.0 ms to 132.8 ms -78No.EX-OMZ0024 Data

90

size: 4 Inch size: 5/32" 3.5 38.5 A 16.5 1 Suction filter 15 Vacuum (V) port 78.8 A C V port type 06 08 07 09 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 1 Refer to page 22 for dimensions with a bracket mounted.

S Couplers Series KK/KKH/KK13

KK2P-23E -04E -06E KK3P-04E -06E -08E -10E KK4P-06E -08E -10E -12E KK6P-12E -16E KK2S-23E -04E -06E KK3S-04E -06E -08E -10E KK4S-06E -08E -10E -12E KK6S-12E -16E 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 166 S Couplers Series KK Specifications K M Fluid Air, Water KK2: 100 kPa to 1 MPa KK3: 90 kPa to 1 MPa KK4/6: 0 to 1 MPa H Operating

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Bit line Bit Details 7 6 5 4 3 2 1 0 Time base Multiplier Bit 0 to 5: Multiplier (0 to 1) Bit 6 to 7: time base (00, 01, 10) Calculation condition Time base Time base value Calculation Cycle time 00 0.1 ms Multiplier x Time base 0.4 ms to 6.3 ms 01 0.4 ms 6.4 ms + multiplier x Time base 6.4 ms to 31.6 ms 10 1.6 ms 32.0 ms + multiplier x Time base 32.0 ms to 132.8 ms -78No.EX-OMX1011 Data

HRX-OM-X010

Figure 6-1 Error Occurrence HRZ Series 6.1 Error Message 6-1 6-1 HRX-OM-X010 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types. Alarm Code.01 to 21,24,25,28,29,32: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect.

HRX-OM-I051

Figure 6-1 Error Occurrence HRZ Series 6.1 Error Message 6-1 HRX-OM-I051 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types. Alarm Code.01 to 20, 22, 24, 25: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

8.2 16 18 20.5 16 16 18 20.5 17 32 35 39 31.5 32 35 39 3 6 8 10 5 6 8.5 10 When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.

ISA2

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

HRX-OM-K003

Front Figure 6-1 Error Occurrence HRW Series 6.1 Error Message 6-1 HRX-OM-K003 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types. Alarm Code.01 to 08, 10 to 19, 22, 24, 29, 30: Eliminate the error cause.

3 Port Solenoid Valve

6 one-touch fitting (Long elbow) 12 No.

SMC Wireless System PROFINET compatible

to the operation manual for the digital and analogue unit. information. (6)-1 Short-circuited power supply voltage for control and input (US1). (6)-2 Short-circuited power supply voltage (7) Replace the valve and check the operation. for output (US2). (6)-3 Short-circuited output load (6)-4 Analogue I/O upper and lower set limit exceeded (6)-5 Analogue Input range upper and lower limit exceeded

High Purity Chemical Valve

Port size Symbol 01 02 02 03 03 04 Body class Port size 1/8 1/4 1/4 3/8 3/8 1/2 Pilot port thread type 2 Symbol Nil N Thread type Rc NPT 3 4 Integral fitting type/Variations Model LVH20 LVH30 LVH40 Orifice diameter 4 8 10 Tubing O.D. Metric 3, 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.