Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C4H (ø4 One-touch Fitting, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

S Couplers Series KK/KK13

Lock 1 S Couplers Series KK Variations Plug (P) Socket (S) Male thread type Male thread type Body size Part no. Body size Port size Part no.

ZSE1/ISE1

ZSE1-01-15CN1 pc.

HRX-OM-R016

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

HRX-OM-R005

AL.01 Contact output 3 function ALM Contact output 3 operation B Selected for contact output 3 AL.01 5.2 Function HRS Series 5-6 HRX-OM-R005 Chapter 5 Display and setting of various functions 5.3 Main screen 5.3.1 Main screen Displays the current temperature and the set temperature of the circulating fluid.

HRX-OM-S004

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000

AS-FPQ/AS-FPG

P-80 (D)

COQ2BP

The figure a seal vent $MC PneumatICS' unique figure 8 seal incorporales vents that allow pressufized air to flow into an Integrated cavity forcing the seal firmly against the opposite side 01 the piston seal groove creating a much tighter, more positive barrier against leakage.

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

•

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

PSE200

ZS-26-E (4 pcs. per set) Connector 3 Multi-channel Controller Series PSE200 Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage 55mA or less (Current consumption for sensor is not included.)