MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Electric Actuator/Slider Type

LECSS2-T Front view example Main Circuit Power Supply Connector: CNP1 Accessory L1 Terminal name Function Details L2 L3 N() Control Circuit Power Supply Connector: CNP2 Accessory P3 Terminal name Function Details P(+) Regeneration option Connect between P(+) and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

SYA3000/5000/7000

) Manual override (Non-locking) 1.3 (Ventilation hole) M5 x 0.8 (P , EA, EB port) 2 x 1.5 die-cast hole (For manifold gasket positioning) SYA3120-M5 M5 x 0.8 (A, B port) 1732 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported 2 position double SYA3220(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

LX

Guide rod type P Actuator configuration Refer to the applicable motor list on the next page.

Electric Actuator Triple Axis P&P Unit

P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth 5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Series M Miniature Fittings M3, R(PT) 1/8, M5

P.90 M-5ALHU-4 4/2.5 1 8 Rc(PT) -M5 female Gasket 6/4 M-5ALHU-6 P. 91 To seal M3 thread.

XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Series KP/KPQ/KPG

M5 size standardized P Resin parts are P.P.

Series KP/KPQ/KPG

M5 size standardized P Resin parts are P.P.

Intrinsically Safe Valve

x 0.8 (Pilot EXH port) Manual override 17.6 109.7 33.7 EA P EB PE X A A A A 24 23.6 20 20 65.4 5.3 20 29 7.3 68 39 B B B B 6 x 1/4" {P(1), EA(5), EB(3) port} 46.3 M5 x 0.8 (External pilot port) (Pitch) P = 17.5 21 L1 L2 5 Stations 1 n 2 47.5 53 38 27.3 8.5 9.8 2n x 1/4" {A(4), B(2) port} (Pitch) P = 17.5 19 L (Lead wire length) L-type plug connector

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

M5: 5.7) 35 5.5 53 (For top ported) Cover dia. 1.6 Cross section 0.34 mm2 39.5 7.8 42.5 P R 1 3 15 8 2-M5 x 0.8 PE port 13.4 2-Rc 1/8 Port 3(R) 16.3 41.2 2-Rc 1/8 1(P) port 46.5 The broken lines indicate the DIN rail mounting style [-D].

SMC Pneumatic Clean Series

style (G) / CBM2G, CBM2G Relief port M5 x 0.8 24 H2 DL Width across flats B1 2-P (Rc, NPT, G) Standard port Width across flats B2 H1 C2 NN HC Eh8 D I B G N F 1.5 Relief port M5 x 0.8 MM G N A K AL Width across flats NA 2-FD (This drawing shows the cases of 20 and 25.)