Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter), Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Precision Regulator Note 7) Digital pressure switch is shipped together, but not assembled. 819 IR1000/2000/3000 Series For High/Low Temperature Environments 4 Clean Series 1 10 IR 0 IR 0 T Clean series For high/low temperature environments T L For high temperature For low temperature Specifications Specifications ISO Class 3 With M5 fitting (Applicable tubing O.D. 6) Cleanliness Bleed hole L For low temp. environments
0 Description Shield plate Switch ass'y Piston PT fittings Adjustment screw Pointer Spring Scale plate Miniseal Y type Magnet No. q w e r t y u i o !
L bracket (3 + 5) 7 Spacer with T bracket (4 + 5) AF2000 AF3000 AF4000 AFM2000 AFM3000 AFM4000 B210L B310L B410L B210T B310T B410T Y20 Y30 Y40 Y20L Y30L Y40L Y20T Y30T Y40T
/PL / 16 108 No.EX##-OMY0006CN 22.F + + SFF 99.98% 99.98% PFDAV (T) Average Probability of -3 1% of 10 -2 1% of 10 Dangerous Failure PFH (T) Probability of dangerous -7 1% of10 -6 1% of 10 failure per hour Achievable Safety Level SIL3 / PL e SIL2 / PL d SIL3/PL e SIL2 PL d 109 No.EX##-OMY0006CN 23.GEX245-FPS EX245-FPS1/2/3 Input delay : tFilter + 2 ms tFilter = Parameterized filter
Static Load
tube polyurethane tube Body rotates at 360 around the stud axis 3.18/2.18 x M5 6/4 x M5 MS-5H-6 MS-5ATHU-3 KA 3.18/2 x M5 P.338 KQG2 Hose elbow For nylon, soft nylon, and polyurethane tube Body rotates at 360 around the stud axis 4/2.5 x M5 4/2.5 x M5 MS-5HLH-4 MS-5ATHU-4 For soft nylon and polyurethane tube KG KFG2 6/4 x M5 6/4 x M5 MS-5ATHU-6 MS-5HLH-6 MS MS P.338 P.339 KKA KP LQ MQR T
(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly
A1 A2 C MS-5ATHU-3 MS-5ATHU-4 1.1 1.4 3.4 3.6 1.6 1.8 8 8.8 8.3 8.8 4.5 5.0 Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. MS-5ATHU-6 2.4 4.2 2.5 7.0 10.8 10.8 MS-5ATHU-3, -4 Tightening of M5 thread Caution Tighten by hand, and give it an additional 1/4 rotation with wrench.
OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: T (w/o Operation
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: T (w
E 21 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.
NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: T (w/o Operation Manual, Calibration Certificate)