IDX-OM-W023

IDX-OM-W023-B / Series IDU8E-10(-C,K,L,M,R,S,T) IDU8E-20(-C,K,L,M,R,T) IDU11E-10(-C,K,L,M,R,S,T) IDU11E-20(-C,K,L,M,R,T) IDU15E1-10(-C,K,L,M,R,S,T) IDU15E1-20(-C,K,L,M,R,T) IDU8E-23(-C,K,L,R,T,V) IDU11E-23(-C,K,L,R,T,V) IDU15E1-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 )

VSA4

VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

A

CEP: 09950-350, Brasil TEL: 11-4051-1177 FAX: 11-4071-6636 GREECE (Distributor) S.Parianopoulos S.A. 7, Konstantinoupoleos Street 11855 Athens, Greece TEL: 01-3426076 FAX: 01-3455578 DENMARK SMC Pneumatik A/S Knudsminde 4 B DK-8300 Odder, Denmark TEL: 70252900 FAX: 70252901 COLOMBIA (Distributor) Airmatic Ltda. Calle 18 69-05 Apart.

Air Suction Filter ZFA Series

(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket 1 pc. on the left R LR ZFA100 Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type 02 01 Port size Applicable model Symbol

ZQ-OM01301

(Pump System) Individual PD specifications Release flow [L/min (ANR) ] Release flow [L/min (ANR) ] Number of needle rotations [rotation] Number of needle rotations [rotation] 36 - Doc.

One-touch Fittings

Q D M L 1: D is maximum diameter.

HRX-OM-K003

Ph (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) * 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max. 50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (Ph4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L) Max.200 Max.70 Calcium hardness (mgCaCO3/L) Max.150 Max.50 Standards Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper

Compact Vacuum Unit Ejector/ Vacuum Pump System

/ZB03-K1/J1 Flow characteristics Exhaust characteristics (Characteristics when the supply pressure is 0.35 MPa) Vacuum pressure Air consumption[L/min(ANR)] Suction flow[L/min(ANR)] Vacuum pressure[kPa] Suction flow[L/min(ANR)] Vacuum pressure[kPa] Air consumption Suction flow Supply pressure [MPa] Suction flow [L/min(ANR)] Nozzle I.D. 0.4 Supply Valve: Large Flow Type (N.C.)

ZB-OM00301

min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.4 N.C. / ZB04-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.5 N.C. / ZB05-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.6 N.C. / ZB06-K1/J1 (0.5MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [MPa] [L/min(ANR)] 38 - No.ZB-OM00301 0.3 / ZB03-Q1/Q2 (0.5MPa ) [L/min(ANR

Prevents Micro-Bubbles

L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

45

AXT100-DS25015 030 050 L Terminal no.

KRM

Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd. Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Modular Type Air Filters Series AF

0.04 0.04 0.02 0.02 0.02 0 0 2000 4000 6000 00 00 5000 10 15000 2000 4000 6000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AF60 Rc1 0.10 0.08 Pressure drop (MPa) P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.06 P1 = 0.1 MPa 0.04 0.02 0 0 5000 10 15000 Flow rate (l/min (ANR)) Specific Product Precautions Be sure to read before handling.

45

AXT100-DS25015 030 050 L Terminal no.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

A-HEC-OM-J004

(mgFe/L) 1.0 or less Copper (mgCu/L) 0.3 or less Sulphide ion (mgS2-/L) None detected +/L) 1.0 or less Ammonium ion (mgNH4 Residual chlorine (mgCl/L) 0.3 or less Free carbon (mgCO2/L) 4.0 or less Filtration (m) 5 or less 4.2 Piping 4-5 A_HEC-OM-J004-4 Chapter 4 Set-up 4.2.3 Preparation of Recirculating Fluid Supply recirculating fluid slowly by using a funnel or a manual pump.

3 Port Solenoid Valve

L Terminal no.

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

JXCx-OMT0028CN

(H) 00 64 h (H) (L) 44 - 32 32 1)700.00mm GW [OUT Data]Address.6 Address.9 0.01mm 700.00mm 7016 00011170h PLC 00 01 11 70 h 2)-700.00mm GW [OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address