Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1.5 6 ZPNA-M18 27 31.2 M18 x 1.5 9 ZPNA-M22 30 34.6 M22 x 1.5 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d Dimensions (mm) B A B d L 11 5.5 M3 x 0.5 8 L 12 7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214

MGC

20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (27) 21 (30) 33 (

Check Valve Series AK 1

Effective area (mm2) Weight (g) A L M Model M5, UNF10-32> AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 4 2.8 12.7 Applicable tubing 2.8 6.5 6.5

VQ4000

B 2 B 2 B 2 B 2 B 2 B 2 B B B B B B B B B A A A A A A A A 8 VQZ SMC SMC SMC SMC SMC SMC SMC 7 VQD 6 5 L2 L1 4 3 2 P = 25 P = 25 1 50.5 44 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side 37.5 10.2 12 106.5 43.5 178.5 50.5 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum 16 stations) L n 9 288 301 8 263 276 L1 L2 7 238 251 6 213 226 5 188 201 4 163 176

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

3 Port Solenoid Valve

2 3 Port size Symbol Nil M3 M5 Sub-plate Without sub-plate With sub-plate S070 B 5 B G Base Mounted S070 C 5 B G 32 Body Ported Body type Body type Body ported Symbol C Port size Symbol 32 Connection Barb fitting Applicable tubing 3.18/2 Coil voltage 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Electrical entry G Grommet C Plug lead with light/ surge voltage suppressor Power consumption Pressure

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

MS-5ALHU-3 MS-5P H/DL L/LL For polyurethane tube 3.18/2 x M5 P.339 KC Extention fitting Solid piece moves fitting up from work piece M5 male x M5 female 4/2.5 x M5 MS-5J MS-5ALHU-4 KK For soft nylon and polyurethane tube P.339 KK130 Nipple Fitting to workpiece and fitting to fitting connection M5 male x M5 male 6/4 x M5 MS-5N MS-5ALHU-6 DM P.338 P.339 KDM Universal nipple Hose nipple Body

Mechanical Valves Series NVM, NVFM, NVZNI

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

IIIIIII

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

Series VCS

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

CU

4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

ZSE F/ISE

F 22 L For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5

Series CE1

OUT OUT Proper Auto Switch Mounting Positions (Stroke End) Proper Auto Switch Mounting Positions(Series CE1) Auto switch (mm) Bore size (mm) Auto switch model Symbol 20 32 40 50 63 12 A B A B A B A B A B A B A B A B A B 40.5 47 55 79 82 85.5 D-A7, A8 4 13 17 39 44 41.5 41 47.5 55.5 79.5 82.5 86 D-A7lH, A80H, A73C, A80C, D-F7l, J79, F7lV, J79C 4.5 13.5 17.5 39.5 44.5 42 A B 38 44.5 52.5 76.5

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.