Rotary Table

When the rotational axis and load center of Rectangular parallelepiped) Position of rotational axis: Perpendicular to the plate through the center of gravity gravity are not consistent L 2 r I = K + mL K: Moment of inertia around a b the load center of gravity 2 2 b a + 2 r I = m 12 4.Round plate K = m2 9. Gear transmission 4.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Rotary Table

When the rotational axis and load center of Rectangular parallelepiped) Position of rotational axis: Perpendicular to the plate through the center of gravity gravity are not consistent L r 2 I = K + mL K: Moment of inertia around a b the load center of gravity 2 2 b a I = m 12 2 r 4.Round plate K = m2 9. Gear transmission 4.

ITV

Attachments B310T B410T T-bracket Y30 Y40 Spacer 234 Y30L Y40L Spacer with L-bracket Y30T Y40T Spacer with T-bracket qAF4000 wAFM4000 eITV3000 Modular Products and Accessory Combinations Applicable products and accessories Applicable model ITV20ll ITV30ll AF3000 AF4000 q Air filter w Mist separator e L-bracket r T-bracket t Spacer y Spacer with L-bracket u Spacer with T-bracket AFM3000 AFM4000

ZSE20(F)_ISE20

female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts are in both English and

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

Electro-Pneumatic Regulator IT1000/2000/4000

I Linearity =1cro or less I Hysteresis 0.5olo or less I Shock and vibration resistant (At fullspan) I Monitor signal output Repeatability i0.5% ElectroPneumatic Regulator ITI 02000.4000 I o r4'7 {0.01 -o.5 M5, PT,PF, NPT,I/8 .71 -14 {0.05-1 O} PT, PF, NPT 'v4,3t4,12 4-wi(e 0-5VDC, 0-10vDC Max. 12VDC Max. current Input signal svmbor Voltage InFlt lmpedan K <{-_-l -f], Cor|duit, DIN connector

W2M/4M

I Linearity =1cro or less I Hysteresis 0.5olo or less I Shock and vibration resistant (At fullspan) I Monitor signal output Repeatability i0.5% ElectroPneumatic Regulator ITI 02000.4000 I o r4'7 {0.01 -o.5 M5, PT,PF, NPT,I/8 .71 -14 {0.05-1 O} PT, PF, NPT 'v4,3t4,12 4-wi(e 0-5VDC, 0-10vDC Max. 12VDC Max. current Input signal svmbor Voltage InFlt lmpedan K <{-_-l -f], lmpedance tl or less

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

LEKF-OMZ0035

E K F S 32 R S3 B 200 N S 2 A2 Motor type Size Motor mounting Symbol Type Output(W) Size Compatible driver Nil In-line 25 32 40 S2 100 25 LECSA-S1 R Right side parallel AC servo motor S3 200 32 LECSA-S3 Incremental L Left side parallel S4 400 40 LECSA2-S4 encoder Lead[mm] LECSB2-T5 Symbol LEKFS25 LEKFS32 LEKFS40 LECSC2-T5 T6 100 25 LECSN2-T5H 20 24 30 LECSS2-T5 A 12 16 20 LECSB2-T7 B 6 8

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Series 10-MGF ø40, ø63, ø100 Guide Table

L L 3. Do not allow hands or fingers near the cylinder during its operation. Your fingers may be caught between the body and the plate. If you need to come near the cylinder during its operation, install a cover on the cylinder. Maximum tightening torque (Nm) L (mm) Model Bolt M6 x 1 MGF40 10 8 M8 x 1.25 MGF63 25 10 M10 x 1.5 MGF100 51 10 Mounting from bottom side 4.

Series 10-MGF Guide table ø40, ø63, ø100

L L 3. Do not allow hands or fingers near the cylinder during its operation. Your fingers may be caught between the body and the plate. If you need to come near the cylinder during its operation, install a cover on the cylinder. Maximum tightening torque Nm L(mm) Model Bolt M6 x 1 MGF40 10 7.5 M8 x 1.25 MGF63 25 9 M10 x 1.5 MGF100 51 9 Mounting from bottom side 4.

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

High Vacuum L Type Valve

MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

Vacuum Ejector with Solid State Timer, Series ZMA

min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm

Vacuum Ejector with Solid State Timer

min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 SMC Pneumatics, Inc.