Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Reduced maintenance (No need for control or replacement) Positioning repeatability: 0.01 mm*3 *1 Compared with the LEFS *2 Size 40, Mep, Overhang: 300 mm *3 Excludes the lead H Step Motor Controller JXC Series p. 3 Battery-less Absolute Type (Step Motor 24 VDC) MDirect input type MStep data input type LEKFS Series P-E21-6 Electric Actuator High Rigidity and High Precision

Soft Start-up Valve

H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)m-A 3/4,

Fluoropolymer Tubing Variations

KM P.502 P.503 KF M H/DL L/LL KC KK KK130 FEP Tubing (Fluoropolymer) TH/TIH Series Soft Fluoropolymer Tubing TD/TID Series DM Modified PTFE Material FEP Material KDM KB Flexibility improved by approx. 20% (Compared with SMC TL/TIL Series) Suitable for applications which require flexibility. This has better resistance in chemical environments.

With Factory Installed

~---l---+-+-H 8 0perating pressure is 0.lSMPa{1.Skgf/cm2} or more. 0.15 i;c ,.,:+-t--t..o-t---t--t---"-l--+-H O Orain piping should be .010 tube (inside 0.1 r===t=l===t---H diameter 4mm) and less than Sm in length. 8 Rotate drain cock left direction in manual exhaust for emergency. , ".' " ... ~" O~ 0.2 0.3 OA OS 0.6 0 7 08 0 9 2000 4000 Flow rate /min (ANR) Inlet pressure MPa (Differential

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

LV50-OMQ0002

Hysteresis H 1 Hysteresis mode LLL Instantaneous flow Normal output Hysteresis H 1 Hysteresis H 1 Window comparator mode LLL Instantaneous flow Hysteresis H_1 Hysteresis mode LLL Instantaneous flow Reversed output Hysteresis H 1 Hysteresis H 1 Window comparator mode LLL Instantaneous flow -49No.LV50***-OMQ0002-G [F33] Close proximity setting Use this setting when multiple products are installed

HRX-OM-M090

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Filling of Circulating Fluid Liquid level Fig. 4-6 Filling of Circulating Fluid Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fluid level falls lower than L. 4.3 Preparation of circulating fluid HRS Series 4-4 HRX-OM-M090 Chapter 4 Starting the Product 4.

HRX-OM-R016

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Filling of Circulating Fluid Liquid level Fig. 4-6 Filling of Circulating Fluid Supply the circulating fluid up to the H mark on the tank. Operation will stop when the fluid level falls lower than L. 4.3 Preparation of circulating fluid HRS Series 4-4 HRX-OM-R016 Chapter 4 Starting the Product 4.

HRX-OM-W038

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Tank lid Filling of Circulating Fluid Liquid level Fig. 4-6 Filling of Circulating Fluid Check the drain port is closed by the valve to prevent the supplied circulating fluid from draining out. Supply the circulating fluid up to the H mark on the tank.

HRX-OM-R005

Open the tank lid and supply the circulating fluid up to the H mark on the tank. Fig. 4-6 Filling of Circulating Fluid Check the drain port is closed by the valve to prevent the supplied circulating fluid from draining out. Supply the circulating fluid up to the H mark on the tank.

A_HEC-OM-J017

STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) HEC 3-2 Communication Format Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK UT CR (Possible to omit) COM indicates communication command.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

AC Servo Motor Driver (Pulse input type/Positioning type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial value Recommended Value Parameter *1,*2 Para No Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3. PA06 1 100 (Positioning mode: 10) Electronic gear denominator *3.

SFOD-OMT0005CN

Word0:IN05(bit05) )No.1 bit0:IN0=ON 15:IN15=OFF (3)Word1,bit415: No. bit ON bit OFF ) [] Word1, bit6=ON Word1,bit45715=OFF (4)Word2,bit89 Word317 )[]50.00[mm] 5000[0.01mm]=(01388)h Word4:(L)= (1388)h Word5:(H)= (0)h (5)bit Word2,bit0:=ON ON (6)Word0:BUSY=ON (7)Word0:INP=ON (INP ON INP(P.34)) Word0:BUSY=OFF Word0:INP=ON Word0:BUSY=OFF 24V 0V (2) ON OFF IN05 SVON (DRIVE ) OFF DRIVE

JXCx-OMT0032CN

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

MDHR3-10 1122MDHR3-15 1122H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. protrusion of auto switch from edge of body: L, H Max. protrusion of auto switch from edge of body: H (mm) (mm) D-M9 D-M9V D-M9V Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-M9. 2.3 H 939 Rotary Actuated Air

Series CE1

Materials: 12, 20 Steel 32 to 63 Rolled steel 30 d (mm) Bore (mm) D C H d B C D Part No.

CYP

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

SZ3000

Specifications F EX140-SUW1 NKE Corp.: Uni-wire System H EX140-SUH1 NKE Corp.: Uni-wire H System J1 EX140-SSL1 SUNX Corp.: S-LINK System (16 output points) J2 SUNX Corp.: S-LINK System (8 output points) EX140-SSL2 SV SZ SY Type SF NKE Corporation Uni-wire System Type SH NKE Corporation Uni-wire H System Type SJ1/SJ2 SUNX Corporation S-LINK System SYJ SX Courtesy of Steven Engineering, Inc