A S G D L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU F H J JA JB JJ K Size Rotation angle 20 30 40 90, 180 50 25 2.5 63 (11) 14 34 14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14
Model number: HRS040-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.
6 Bore size (mm) 6 10 12 16 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22
Slrcke = 0.79 (20mm) with Bool Millmelersrn Pareh$eses 7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS REPAIR KITS SINGLE CLEVIS aoaE d,E L1 dNo NX 2.36 t-05 2 . 9 1 1.06 1 . 1 0 M 1 8 x 1 . 50.61 4.79 \20) 02 +0.070) (,27) (60) (28) \74) 115.5) 047 + 0.003 I 1 o 2.36 0.79 r.05 2.91 1.06 M 1 8 x l . 5 0 6 i (r2 +0.070) (16 "') (28) (60) (15.5) 120) \211 (13+0.070) 1 1 0 ; f f (28 ;)
For with cap Applicable absorber B C h1 h2 MM d f h M6 x 0.75 MM B 2 C 8 For basic type RBC08S RBC10S RBC14S RBC20S RBC27S RJ06J RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S RJ08 12 13.9 6.5 23 M8 x 1.0 9 15 9.2 RJ10 M8 x 1.0 14 16.2 8 23 M10 x 1.0 11 15 4 12 13.9 RJ14 M10 x 1.0 19 21.9 11 31 M14 x 1.5 15 20 4 14 16.2 M14 x 1.5 RJ2015 27 31.2 16 40 M20 x 1.5 23 25 6 19 21.9
for 3 to 5 seconds to display [F ] on the main screen.
, 24V (power supply) F GND (0V) Black G Shield GND (connected to F.G.)
TL TG effective depth TL TD TB TC D (g6) DD (h9) A AU B BA BB BE J JA JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (
JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).
x P (Rc, NPT, G) NA AL F Width across flats B1 H1 2 x NN Standard port Relief port M5 x 0.8 H2 I Relief port D C B 4 x LD LH MM 2 x 4 3.2 N X Y N X Y S + Stroke LX LS + Stroke Z LZ ZZ + Stroke (mm) AL LH LS LZ MM G NA N LX LD D C A B 16 13 13 13 8 F Bore size K H1 H 8 6 6 5 H2 I 41 32 32 26 B2 54 47 47 40 B1 Stroke range 50 45 45 41 M10 x 1.25 M8 x 1.25 30 40 32 25 20 5.5 5.5 5 200 to 1000
D 16 inputs M12 connector (5 pins) 8 pcs. E 16 inputs D-sub connector (25 pins) F 16 inputs Spring type terminal block (32 pins) * For specifications, refer to the Fieldbus system EX600 series in the Web Catalog.
Model number: HRS050-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.
0 EX600-DX *F (16 points) 16 0 EX600-DY *B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points)
> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4] <> [F 4] 1000 100 [F 4] [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 26[F 0] -31No.PS-OML0002CN-G [F 5] <> [F 5] [F 5] -32No.PS-OML0002CN-G OUT1 AP1 (OUT1AP1 1AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1AP2) OUT2 P_1 H_1(n_1 H_1)AP2 (OUT2AP2 1 ) OUT2 OUT2OUT1OUT2
C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133
M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
kPa ONOFF ISE20A0.050 MPa ZSE20A5.1 kPa ZSE20AF5.0 kPa 1.5 ms OUT1 ON OUT1 OFF -28No.PS-OMU0002CN-D [F 2] OUT2 34 [F 1] OUT1 [F 3] 36 0 ms [F 4] 37 [F 5] FUNC 39 [F 6] 41 0% [F10] 42 std() [F11] 48 1000 [F80] 49 OFF [F81] 50 OFF [F82] 52 A [F90] 53 OFF [F96] 55 [F97] 56 OFF [F98] 58 () [F99] 60 OFF XY "---" -29No.PS-OMU0002CN-D [F 0] (kPa/MPa) <> [F 0] [F 0] ZSE20AF
Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface