AMF

Micromist separator AMD900, 1000, 901 Model Connect (Flange) 2B 2B/3B/4B 400 A 280 B 6B C 550 D 150 E 270 F 823 G 3 H 797 J 620 AMF801 AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 Mounting Caution q Verify the direction of the flow of the compressed air and the "e" mark that indicates the inlet of the product before connecting.

Filter Regulator AW30, 40

1/4 Non-relieving Flow direction: Right to left Drain cock with barb fitting: 6 x 4 nylon tube Note 1) Body size 3 8 30 40 1 2 Note 2) Thread type Metric thread (M5) Rc NPT G Nil Display units for product name plate, caution plate for bowl, and pressure gauge: PSI, F Note 3) Note 1) N F When more than one specification is required, indicate in ascending alphabetical order.

Process Pump

bracket type With bracket which can be mounted to the back of the previous type With bracket which can be mounted to the foot at the back of the previous type Symbol Type Rc NPT G Nil N F With bracket which can be mounted to the back of the previous type: C With bracket which can be mounted to the foot at the back of the previous type: F 56 2 x M4 x 0.7 2 x 4.5 84 72 45 7 48.5 41 5 Process

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

MU

Mounting style Without auto switch (Built-in magnet) Auto switch Basic style Foot style Flange style B L F Nil For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

MU

Mounting style Without auto switch (Built-in magnet) Auto switch Basic style Foot style Flange style B L F Nil For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

HAA

HAl Accessories (Options) HAA7 AT Auto drain Applicable Model HAA7 HAA15 HAA22 HAA37 HAA7-F AD402-03 HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F AD402-03 HAA22-S HAA37-F AD402-04 IDl Dust protecting filter Mounting bench HAA37-S AMG How to Select (Flow Capacity l/min (ANR)) Operation Principle AFF Model HAA7 HAA15 HAA22 HAA37 AMl 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note VZ2000-37A-2 For VZ22 AN120-M5 Noise reduction: 18 dB or more (8 x 17l ) AN110-01 Noise reduction: 21 dB or more (13 x 38l ) Description M5 R 1/8 (2) Silencer Note 1) For body ported type Note 2) For sub-plate mounted type 4-15-1 2 Series VZ200 How to Order Option M5 1 2 VZ2 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Series VZ200 Only body ported type Type of actuation

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

70pvvna

A B C NBR seals FKM seals EPR seals Nil F N T Rc G NPT NPTF Nil B None With bracket (VN-16) :Valve size Note 1) Valve size 1 comes with NV1-A16 (with thread). Note 2) Shipped after assembled at our factory. Refer to Table (1) for availability.

Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)