Rotary Cylinder Series MRQ Size: 32, 40 1

12.5 3 15 20 Angle adjustment screw 32 15 17.5 20 4 25 30 30 12.5 15 (mm) 3 L Max. 32 Max. 31.5 Size 32 40 20 15 40 Possible to Change the Specifications from the Basic Style to -X5 17.5 20 4 25 Specify the part number for hexagon socket head cap screw for angle adjustment referring to the list below. 30 30 Size 32 40 Part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

[I/O cable] LEC CK4 Cable length (L) [m] 1 1.5 3 3 5 5 Controller side PLC side (16) (7.9) (10) (11) (30) (60) (L) Conductor size: AWG26 Weight Terminal no.

Compact Manifold Regulator

PVQ VY1 VBA VBAT 3. Semi-standard 4.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5MPa Allowable Lateral Load at Rod End Standard type: MQQTB Lateral load resisting type: MQQLB/Built-in ball bushing 60 5 50 Maximum allowable lateral load W(N) Maximum allowable lateral load W(N) 4 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral

53

Power Cable Specifications Rated value for thermo-chiller Power cable examples Terminal block screw diameter Cable size Crimped terminal on the thermochiller side Power supply Applicable breaker rated current Applicable model 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable) R5.5-5 HRSH090-ll-20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 3 x 5.5 mm2 (3 x

BP1000

Installation unit gauge port Pressure range Unit Regulator Code 2) Part number 3) Lower mount material Select compatible materials of construction for the gas Gas V15 V3 L 1 H V2 2 4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig

Magnetically Coupled Rodless Cylinder

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

Vacuum Pad: Ball Joint Type

width across flats 3 E D C 3 2 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke A (mm) B C D E F H I J Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 126.5 ZPR25F10-0-A14 25 28 50 ZPR32F10-0-A14 13 16 29.8 59 47 32 35 127 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model H I J R S R S Stroke ZPR20F10-0-A14 20 +10 3 0 ZPR25F10-0-A14 30 +20 +7 12.8 24.3 15.2 26.2 ZPR32F10-0-A14

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

FX D N MM H A AL 3 K Width across flats KA F FX ZZ + Stroke S + Stroke N (mm) B1 36 30 26 22 ND 20-0.033 0 34 31 31 27 H1 AL MM FX 32-0.039 0 7 5.5 5.5 5 K I H FF GB GC KA 22 22 GA ZZ S P N F D A 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 104 78 76 76 24 22 22 18 42.5 34.5 30 24 40 32 25 20 21 19.5 19.5 15.5 14 12 10 8 30.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 17

RSQ

MI W S 100 200 50 CEP1 130 50 100 50 40 40 CE1 40 Weight of transferred object m (kg) Weight of transferred object m (kg) 32 30 40 50 CE2 20 30 32 20 ML2B 20 16 10 C J G5-S 10 12 5 4 CV 3 4 5 3 MVGQ 2 2 CC 1 1 RB 1 5 10 20 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) J Lateral Load and Operating Pressure DThe larger the lateral load, the higher the operating pressure required

HRX-OM-T004

31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS090 Series 4.5 Message configuration 4-9 HRX-OM-T004 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

HRX-OM-R028

31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Read Data1 Byte Count Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-R028 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read

Modular Type Regulator Series AR

Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Name plate and pressure gauge in imperial units (PSI, F) When more than one specification is required, indicate in ascending alphanumeric order.

CL

3 !4 !5 !6 !7 No.

Clamp Cylinder with Lock Series CLK1

cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 GA W GB 17 1010 32 3 BX 14 30 45 45 M 3 Approx.

SX

EXH port EXH port Flat Ribbon Cable Assembly Cable length (L) 10 pins 20 pins 26 pins 1.5 m 3 m 5 m AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 Series Assembly part no. Port size Series Assembly part no.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ 12 12 SS 30 M8 x 1.25 x 6 L (Hexagon socket set screw) 6 30 1 Z 2 x 6.9 through 2 x 11 counterbore depth 6.3 28 1 600.2 600.2 3 5 80 78 64 6.3 5 14 2 x M6 x 1 (Through-hole) M6 x 1 x 18.5 L and M6 x 1 2 x M5 x 0.8 Thread depth 7.5 (Hexagon bolt) (Hexagon nut) M6 x 1 x 14 L (Hexagon socket head cap screw) 2 x M5 x 0.8 thread depth 4.5 Note

MRQ

(mm) (mm) 5 20 25 30 10 15 Stroke 50 40 75 100 Y 15 15 20 20 25 12.5 12.5 17.5 15 30 Q 30 20 20 20 73.5 E 66 71 63.5 63.5 63.5 58.5 61 61 61 MRQFS32SMRQ32, #3 (Flange only) 1.5-13 Series MRQ Size40 Basic Style/MRQBS40 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.