3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Pin name Lead wire color 1 DC () Blue Series 20 20A 20B(-L) 20C 2 White 1 Brown ZS-46-5LM12 (Non-waterproof) 2 Function Gray ZS-46-5FM12 (Waterproof) 3 OUT (2) White 2 1 4 OUT (1) Black * If you wish for the sensor (switch body) and the lead wire to be shipped together, please contact SMC. 4 3 5 DC (+) Brown 4 Black 3 Blue * Nothing is connected to Function.

ITV

Input signal Power supply voltage 0 1 2 3 4 Current 4 to 20 mA (Sink type) Current 0 to 20 mA (Sink type) Voltage 0 to 5 VDC Voltage 0 to 10 VDC Preset input 0 1 24 VDC 12 to 15 VDC Option Cable connector type S L N Straight type 3 m Right angle type 3 m Without cable connector Option Monitor output Option Thread type None (for preset input) Analog output 1 to 5V DC Switch output/NPN output

Compact Cylinder

Contents Cylinder tube Aluminum alloy Hard anodized 1 20 25 32 40 50 63 Piston Aluminum alloy Chromated CQ2B20-PS 2 Stainless steel CQ2B25-PS 20, 25 Piston rod 3 Set of nos. above !2, !3, !

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 19.2 20 3.5 0.3 3 4 x M2.5 x 0.45 thread depth 2.5 6.5 12.5 K M 21 3 x M3 x 0.5 thread depth 5 2 N 1 x F 3 depth 2.5 +0.03 0 9 27 F 4 4 x M2.5 x 0.45 thread depth 3.5 6 (Extension end adjuster) 1.5 13.5 3.5 5.5 12 15 10 14 27 20 31 0.5 Retraction end adjuster 4 Extension end adjuster 5.5 3 N x M3 x 0.5 thread depth 4 Note 1) Note 2) 3 depth 2.5

Single Axis Electric Actuator Series LJ1H

thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 1.7 4.8 5.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 92 3-8H10 depth 5 11.5 20 90 (T-slot pitch) 67 45 62 8-6.6 92 9.4 4.5 10 58 30 Stroke + 216 18 T-slot dimensions The

100

3 !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) F1 F1 F1 12-5-20 21 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Construction !

Compact Guide Cylinder

For bore size 20 or more, choice of Rc, NPT, G port is available. (Refer to page 3.)

Rotary Gripper Series MRHQ

Confirm that this value is less than 1/20 of the effective torque. 20 x 9.8 x (m1 + m2) x H/1000 20 x 9.8 x (0.07 + 0.05) x 10/1000 = 0.24 Graph 3 20 + 30 + 12 x 10) x (0.07 + 0.05)/(12 x 10) (K = 2: Safety factor) =

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa Holding force (N) Holding force (N) 0.4MPa 20 20 0.4MPa MHZ2 0.3MPa 0.3MPa MHZJ2 10 10 0.2MPa 0.2MPa MHQ MHL2 0 10 20 30 40 50 0 10 20 30 40 50 L: Holding point length mm Holding point L (mm) Holding point L (mm) MHR MHR2-20/MDHR2-20 MHR2-20/MDHR2-20 MHK Indication of effective holding force The holding force shown in the tables represents the holding force of one finger when all

air-filter-e

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Air Preparation Equipment

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Tamper Proof and Flat Head Screw

In-line type AS1001F AS2001F AS2051F AS3001F AS4001F 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 Dual speed controller ASD230F ASD330F ASD430F ASD530F ASD530F ASD630F 6 to 20 20 to 32 20 to 40 20 to 40 40 to 63 63 to 100 M5 1/8 1/4 1/4 3/8 1/2 Applicable cylinder bore size (mm) Piping side port size Cylinder side port size Model AS1200 AS2200 AS3200 AS4200 M5 1 2 1/8 1/4 3/8 1/2 3/4 1 1

MHK2

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

MHK2

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

Fluoropolymer Tubing Variations

Fittings: Fluoropolymer fittings LQ series Fluid Note 1) 2) 3) and applicable fittings Note 1) 2) 3) Fluid: Air, Water, Inert gas Fittings: One-touch fittings KQ2, KQG2, Clean One-touch fittings KP, KP Insert fittings KF, KFG2, Miniature fittings M, MS (Hose nipple type) Max. operating pressure (MPa) Refer to the max. operating pressure curve. 10 7 20 15 20 15 35 20 35 20 60 40 95 60 100

53

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating fluid Note 2) Tap water, 15%

Bag Filter

FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

15

Operating Range Auto Switch Mounting Bracket (Switch spacer) Auto switch model Bore size (mm) 6 to 40 Auto switch model Bore size (mm) 6 10 15 20 25 32 40 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 3 3 2.5 2.5 3 2.5 3 BMY3-016 D-A9 D-A9V D-A9 D-A9V 5.5 5.5 5.5 5.5 5.5 5.5 6 Note) Values which include hysteresis are for guideline purposes only, they are not a

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2]*3 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size m42 m56.4