Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

Turntable Cylinder Series MGT

1 63, 80, 100 Series MGT Turntable Cylinder How to Order M 63 50 11 Y59A S S A93 MGT Table unit switch quantity Cylinder with turntable Table unit auto switch type S 1 pc.

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Sine Rodless Cylinder Series REA

Sine Rodless Cylinder Series REA High Speed Cylinder Up To 12in/s Smooth Deceleration Construction Designed To Transport Delicate Workpieces Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products Glass products Allows rapid transport o Major improvement of throughput Rapid transport has been achieved with a maximum drive speed of 300mm/s (12in/s).

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Angle Seat Valve /

The value of the effective area S, like that of sonic conductance C, expresses the ease of flow. (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q : Air flow rate [dm3/min (ANR)], dm3

Desktop Duster Box

Dust removal Dust collection Blow nozzle with improved dust removal efficiency IZH A4 size [ZVB20] 210 x 297 mm (Dimensions) 202 x 212 mm (Static neutralization space) A3 size [ZVB40] 400 x 384 mm (Dimensions) 392 x 298 mm (Static neutralization space) Lamp cover Smartphone c e s e i o p f k v r o a w r i Cosmetic case o Lens s u t s r o s p i p z e u s S .

Rotary Gripper Series MRHQ

Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Note: 1in = 25.4mm 1MPa = 145psi 80 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60 0.7MPa 0.4MPa 0.3MPa 0.4MPa 40 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 4 Rotary Gripper Series MRHQ Effective Gripping Force Effective

Stroke Reading Cylinder and Counter

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4 x 4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 64 59 3) 15 mA when BCD is output (Refer to page 676.) 668

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

Bernoulli Gripper

140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 300 200 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 250 160 140 200 120 100 150 80 100 60 40 50 20 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6

Air Cylinder CP Series Cylinder Positioner Assembly

I n e zz 1 3 8 (35) 170) 2 0 5 (52) 0.79 l2D) 140) 0.39 ( 1 0 ) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/12855 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS15, CXSL15 10-/11221221Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

PF3W7x.eng

Used as switch output device 225o [ dtH2] Delay time setting at ON [ 0.00] 0.00 s No.

JXCx-OMT0034CN

CN1IF (CONT) 19 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SW OFF RWw(n+1)b0 ON(1) (LEC) (LEC)(LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.CN2TB/PC () 20 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 1 () 4 0V 5 FG FG (LEC)(0V)

MLGC

Unit: mm Piston speed (mm/s) Lock style 50 100 300 500 In terms of specific load conditions, the allowable kinetic energy indicated in the table above is equivalent to a 50% load ratio at 0.5MPa, and a piston speed of 300mm/sec.

3 Port Solenoid Valve Metal Seal Series VZ200 1

1 Sub-plate Assembly Part No.: VZ400-S!2 Mounting bolt and gasket are not attached. Carbon steel Round head combination screw !4 !5 !6 Pilot valve assembly !

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

S 1 pc. Thread type Body option N n pcs.