ZP

Dimensions: With Adapter ZPT H-A14 (Male thread) 40 50 ZPT H-A16 (Male thread) 63 80 ZPT H-A16 (Male thread) 100 125 1/8 (Rc, NPT, NPTF) 1/8 (Rc, NPT, NPTF) Width across flat 22 (Hexagon) Width across flat 19 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 22 (Hexagon) 4 x M5 x 10 Width across flat 19 (Hexagon) 70 45 4 x M4 x 8 28 E Width across flat 24 (Hexagon) Width across flat 24 (Hexagon

5

37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 41 122 -X 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 45 154 159 CM2Y Series Head Flange (G) CM2YG Bore size Stroke Z Effective thread length 2 x FL Width across flats B1 Width across flats B2 2 x NN 4 x FD 2 x FD H1 H2 G G 2 x P (Rc, NPT, G) Mounting hole Mounting hole C2 Eh8 D

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

42

Item Specifications External power supply 24 VDC +10%, 5% Current consumption (Internal unit) 0.1 A How to Order Manifold [Option] VV5Q 08 S 03 Q U 1 5 CE-compliant Nil Q CE-compliant Option Symbol Option Nil None CD1 Note 2) Exhaust cleaner for Rc 1: D side exhaust CD2 Note 2) Exhaust cleaner for Rc 1 1/2: D side exhaust CU1 Note 2) Exhaust cleaner for Rc 1: U side exhaust CU2 Note 2) Exhaust

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

MGP

Connecting threads Rc 1/8 Rc 1/4 Rc 3/8 Proper tightening torque Nm 7 to 9 12 to 14 22 to 24 Caution Caution 1. Do not scratch or gouge the sliding part of the piston rod or guide rod. This will cause air leakage or malfunction due to damage of the seals. 2.

MG

Refer to pages 8-19-8 to 8-19-24.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75

CM2

Since there are other applicable auto switches than listed above, refer to page 6-4-24 for details.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

32.5 21.5 21.5 6 6 10 6 6 15 10 8.5 8.5 17 17 17 17 15 45.5 45.5 4-Rc(PT)1/8 (Piping port) 24 24 32 4-Rc(PT)1/8 (Piping port) 32 [ ] for AC Other dimensions are the same as the grommet style

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

22 24 3/8" TI/ TIL 3/8" PA 21 33.1 30 28 30 1/2" PAX 1/2" PB 26 40 36 32 36 3/4" 17-5-115 20 Series LQ2 Dimensions Female Connector: LQ2H-F Metric sizes Connection threads Rc/NPT Model L H M W E Applicable tubing O.D.

High Purity Fluoropolymer

22 24 3/8" 3/8" 33.1 30 28 21 30 1/2" 1/2" 40 36 32 26 36 3/4" 21 High Purity Fluoropolymer Fittings Series LQ2 Female Connector: LQ2H-F Metric sizes Connection threads Rc/NPT Model Applicable tubing O.D.

VQZ1000/2000/3000

PE port 18 18 Rc 1/4, 3/8 1(P) port (For Rc 1/4) (For Rc 1/4) 2-Rc 1/4, 3/8 3(R2), 5(R1) port 21 21 M5 x 0.8 external pilot port (Only external pilot type (R)) (For Rc 3/8) (For Rc 3/8) 33 L plug connector (L): VQZ3150 1(R)-L-02 03 DIN terminal (Y): VQZ3150 1(R)-Y-02 03 Indicator light 300 108.5 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 111.5 Max. 10 Applicable

SYJ3000/5000/7000

Nil : : Nil Rc Single solenoid coil is on same side as the A, B port.

Air Cylinder

24 23 13 23 126 127 137 8 25 72 73 83 13 24 24 23 13 23 130 131 141 8 32 72 75 83 13 24 24 21 13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke

Table of Contents

Rp 3/4 socket 1B union 1 1/2B union Rc 3/8 (Rc 3/8) 24 Rc 1/2 (Rc 3/8) 55 36 18 Munsell N-8 (White), Munsell 2.5PB5/8.5 (Blue) 37 22 15 7.5 Thermometer for outlet air temp. (1 pc.) Drain valve (1 pc.) Union (2 pcs.)

SMC Pneumatic Clean Series

Application Relay, PLC 24 VDC relay, PLC IC circuit, Relay, PLC Load current range Indicator light Type Reed switch 2-wire 3-wire Solid state switch Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Auto switch part no.

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

CXWM/CXWL

22 23 23 24 Note 2) 2 magnets for auto switches are equipped to the magnet mounting block.

AC

AV AU Tightening torque when piping Connection thread Applicable torque N/m M5 X 0.8 Rc(PT) Rc(PT) Rc(PT) Rc(PT) Rc(PT) Rc(PT)1 Rc(PT)1 Rc(PT)1 Rc(PT)2 AF 1 6 1.5 to 2 rotation 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 Model Effective area (mm2) Connection R(PT) AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 AR 1 4 3 8 5 35 35 60 90 160