NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block
D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.
C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach
Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 10mm 15mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 15mm 10mm 20mm 20mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt
1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)
Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,
85.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 3 41 54 75 85.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 4 51.5 64.5 87.5
75 75 5 4 4 4 26-0.033 0 26-0.033 0 32-0.039 0 8 10 M32 x 2 82 36 The bracket is shipped together.
) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.
Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface
Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.
a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?
E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)
MGTM MGTL MGPM63 to 100-Carbon steel Flat cylinder w/turntable q MGPL63 to 100-White anodized White anodized White anodized Chromated Chromated Nickel plated High carbon chromium bearing steel Guide plate Bearing guide A Bearing guide B Bearing guide C Bearing guide D Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Carbon steel w e r t y u i o !
7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.
I T C H E S Reed D-90 (DC Only) D-97 (w/LED, DC Only) A-90A (AC or DC) D-93A (w/LED, AC or DC) Solid State D-F9N (W/LED, 3 Wire NPN) D-F9P (W/LED, 3 Wire PNP) D-F9B (W/LED, 2 Wire) N O O F S W I T C H E S 2 Switches S 1Switch Safety Note For cap type mounting, care should be taken not to exceed 6 bar when ejecting the workpiece Courtesy of Steven Engineering, Inc. !
Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.
Basic circuit Cylinder side Cylinder side [Example] 1) [Horizontal] W 3 port normally open SOL.C SOL.B Regulator with relief function SOL.A 3 port normally closed 2) [Vertical] 1) [Horizontal] Load in the direction of rod extension Load in the direction of rod retraction Forward W W Action Forward SOL.A SOL.B SOL.C ON ON OFF Backward Regulator with check valve 0.5 s or more 0 to 0.5 s OFF
w q q With ball joint buffer (Vacuum inlet: Vertical) With ball joint buffer (Vacuum inlet: Lateral) * w to !