Air Pilot Operated Series NVSA

PC 0111-1 1 1 O-Ring , Operatol Buna N 12 Recessed Non-Locking Operator PB 0103 13 Gasket . Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

Multistage Ejector (N)ZL Series

59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36 (N)ZL112-E (ZSE4) (N)ZL112-EB (ZSE4B) (N)ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (mounting hole) 59 85 8 Multistage Ejector Series (N)ZL Dimensions (mm) / Series (N)ZL112 (with Valve) 1in = 25.4mm Scale: 40% With supply valve and release valve (N)ZL112-K1L-E25 (L) P 2-5.4 Mounting hole 13.5 50

SMC

S 1 pc. 22 Vacuum suction type n "n" pcs. Symmetric type Nil Standard type LNote 2) Symmetric type Type of auto switch Bore size (Stroke (mm) ) Adjuster option Nil Without auto switch Nil AS AT A Without adjuster 6 10, 20, 30, 40, 50 Refer to the table below for auto switch model numbers.

HEC_W-E

When the temp. set in this item is reached, the alarm [ERR13] arises. 8-7 Operation 8.6.2 Setting mode, Level 2 F i n e C o n t r o l o f I n t e r n a l S e n s o r M O D E < 0 . 0 7 C 1. Fine Control of Internal Sensor Setting range : -9.99 to 9.99 C Min. increment : 0.01 C Indicated content : Fine adjusting value for internal temp.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

90

No indication is necessary for R; however, indicate N for NPT. A 1.0 MPa pressure gauge is fitted for 0.8 MPa setting. Please contact SMC regarding the supply of pressure gauge with psi unit specifications. Note 3) l in part numbers for a digital pressure switch indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT.

48

n Bore size 12 10 mm x 2 16 12 mm x 2 20 16 mm x 2 25 20 mm x 2 32 25 mm x 2 40 32 mm x 2 50 40 mm x 2 63 45 mm x 2 80 56 mm x 2 100 71 mm x 2 Auto switch Nil Without auto switch (Built-in magnet) For applicable auto switches, refer to the table below.

33

P o i n t Refrigeration circuit control system requires the minimum basic essential function. Temperature control system requires the minimum basic essential function. P o i n t According to the amount of heat generated from users equipment, the system turns power ON/ OFF to the compressor and controls the electronic valve.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Station (Max.20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49 339 300 590 271 561 242 532 213 503 184 474 155 445 126 416 97 387 68 358 39 329 337.5 625 300 587.5 275 562.5 250 537.5 212.5 500 187.5 475 162.5 450 137.5 425 100 387.5 75 362.5 348 635.5 310.5 598 285.5 573 260.5 548 223 510.5

Rotary Table/

Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Load N MSQ2A MSQ20 CRQ2 MSQ 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130

IIIIIII

Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz. (o) 5.1 (144.6) 10.3 (292) Materials Patented Spool and Sleeve Design High Flow vs.

3 Port Air Operated Valve Series SYJA300 1

Model Manifold base model R port model Common Individual Port size Applicable valve model Series VV3PA3-411-02 n VV3PA3-423-02 n VV3PA5-411-03 n VV3PA5-423-03 n VV3PA7-411-04 n VV3PA7-423-04 n Rc Rc Rc Rc Rc Rc 1 4 1 4 3 8 3 8 1 2 1 2 VPA300 VPA344 VPA500 Common Individual VPA544 VPA700 Common Individual VPA744 Option Description Part no.

Mechanical Valves Series NVM, NVFM, NVZNI

Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz. (o) 5.1 (144.6) 10.3 (292) Materials Patented Spool and Sleeve Design High Flow vs.

Fluoropolymer Tubing Variations

Length per roll Color Translucent Translucent Symbol N N R BU B N N N N N KM 10 m Red (Translucent) KF 20 m Blue (Translucent) Black (Opaque) Translucent Translucent Translucent Translucent Translucent Roll M 50 m 100 m 16 m ( 50 ft) H/DL L/LL 33 m (100 ft) 2 m Straight KC Metric O.D. size 3.2 O.D. 5/32" is available in 4 metric tubing, and O.D. 5/16" is available in 8 metric tubing.

1

Number of auto switches [mm] Number of auto switches 1 2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV

5 Port Air Operated Valve

(Station 1) 1/8 [Pilot port: Lateral (-P)] 78 55.5 32.5 24 1/4 [4 (A), 2 (B) port ] A A B B 30 (Pitch) P=33 Dimensions n: Stations 2 3 n L 10 9 8 7 6 5 4 357 L1 L2 93 126 159 192 225 258 291 324 80 113 146 179 212 245 278 311 344 1522

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 16n + 53 L2 = 16n + 87 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 85 119 150 160.5 101 135 162.5 173 117 151 175 185.5 133 167 187.5 198 149 183 212.5 223 165 199 225 235.5 181 215 237.5 248 197 231 262.5 273 213 247 275 285.5 229 263 287.5 298 245 279 300 310.5 261 295 325 335.5 277 311 337.5 348 293 327 350 360.5 309

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.