Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11- Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y 1110 0x0456 0 R/W drE () U8 0 Y 0 1(1/10) 1140 0x0474 0 R/W Cut (Zero-cut) U8 0 Y 010 0 0 1.0% 1800 0x0708 0 R/W Eco () U8 0 Y 0oFF 1on Pin () U8 0 Y 0 1 1810 0x0712 0 R/W 1811 0x0713 0 R/W NPin () U16 0 Y 0999 a F32 N 2000 0x07D0 0 R (63 ) 2001 0x07D1 0 R b F32 N 2002 0x07D2 0 R U16 0 N 6163 2003 0x07D3 0 R
(19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.
Multistage Ejector (N)ZL112 with Valve and (N)ZL212 Large Flow Type (N)ZL Series 3 Stage Construction Optional Supply & Release Valves Optional Pressure Sensors Series (N)ZL Multistage Ejector Energy saving, high flow, 3 stage diffuser construction Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, single stage model) 1 stage
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.
INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.
W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95
Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.2 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: C73, Lead Wire Length
Bearing Type: M (Slide Bearing), Mounting: B (Basic Style), Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 350mm, Rear Plate: R (With Rear Plate), Lock Operation: D (Spring and Pneumatic Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bearing Type: M (Slide Bearing), Mounting: B (Basic Style), Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 800mm, Rear Plate: R (With Rear Plate), Lock Operation: D (Spring and Pneumatic Locking), Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.
Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 450mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: H7A2--Solid State, Gen. Purpose, 3 Wire PNP, Lead Wire or Prewired Connector: 3m, Number: -
Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 75mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: H7B--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -
Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 125mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: H7C--Solid State, Gen. Purpose, 2 Wire, Connector, Lead Wire or Prewired Connector: 3m, Number: -
Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 150mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: H7BW--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -
Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 350mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bearing Type: Slide Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 800mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: 5m, Number: 3 pcs.
Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.2 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: C73, Lead Wire Length
Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.