Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33

Mechanically Jointed Rodless Cylinders

x 8.5 x 1 C-5 C-14 6.2 x 3 x 1.6 23 4 When o and !

Air Cylinder Series MB

W 32 40 50 63 80 100 22 30 35 35 40 40 27 125 to 1000 50 223 97 15 17 120 1/2 38 M27 X 2.0 13 M12 X 1.75 6 20 19 27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/

IZx-OMX0087

Function 4-1. Name of Parts 4-1-1. Controller 1)IZTC41 For IZTC41-L, refer to the IO-Link dedicated instruction manual. 1 2 3 4 5 6 14 7 8 13 12 10 9 11 Table4. Name of parts No.

Electric Actuator Miniature Rod Type Miniature Slide table Type

This matches the controller. (2) Check Parallel I /O configuration matches (NPN or PNP). (1) LEPS6J-50 NPN (2) 13 - 3.3 Construction Parts list 5 9 1 6 10 8 11 16 4 15 14 2 3 13 7 12 No.

/

W 36 46 46 X 11 13 13 Y 15 17.5 17.5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 VXE210 VXE220 VXE220 VXE230 VXE230 Applications 18 Series VXE21/22/23 For Air Dimensions: Manifold/Base Material: Aluminum Normally closed (N.C.): VXE21/22/23 L2 K K L1 N H F D B (B) C A J A V S Q Approx. 300 U 2 x M W X Approx. 280 32 25 D side Stations

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Compressed Air Cleaning Filter Series

Dimensions Dimensions C A Connection Connection B IN OUT IN OUT A B Drain Drain (mm) (mm) AFF series Size AM, AMD, AMH series Size AFF series Size AM, AMD, AMG, AMH series Size Connection A B C Connection A B 15(1/2B), 20(3/4B), 25(1B) JIS 10K FF flange 20(3/4B), 25(1B) JIS 10K FF flange 25(1B), 40(1 1 2B) JIS 10K FF flange 40(1 1 2B), 50(2B) JIS 10K FF flange 15(1/2B), 20(3/4B), 25(1B) JIS

CRBB-OM00004

Gap 15 Cover (B) 1 14 Cover (A) 1 13 Hexagon socket set screw 1 12 Joint 1 11 Hexagon socket head cap screw 2 10 Hexagon socket head cap screw 2 Fig. 1 9 Hexagon socket head cap screw 2 8 Block retainer 2 No gap 7 Stopper block 2 6 Rubber bumper 1 5 Lever retainer 1 4 Stopper lever 1 3 Stopper ring 1 2 Auto switch 2 Fig. 2 1 Rotary actuator 1 Product Assembly procedure For D-S/T99(V), S9P

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

1 !2 !0 #7 @1 #5 @2 @8 @7 #6 @0 #8 !3 !

Suction cups with flange

ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12

IDX-OM-W019

. 12 1 12 2 Specifications . 12 1 12 3 How to perform maintenance . 12 2 Chapter 13 Service Record 13 1 Service Record . 13 1 IDFB Series Table of Contents 2 IDX-OM-W019 Air dryer i Safety Instructions i Safety Instructions Before use,read and comprehend important cautionary notification well on this operation manual. i-1 Warning: Before Using Air Dryer In this chapter, the stated contents

IIIIIII

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

Mechanical Valves Series NVM, NVFM, NVZNI

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

One-touch Fittings Series KQ2

1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

MLGP

-X 1 to 349 20, 25, 32 Applicable stroke (mm) 5 to 345 40 to 80 2025 to 345 100 Part no.: MLGPM20-39-F A 1 mm spacer is installed in MLGPM20-40-F . Dimension C is 77 mm.